Influence of neutron radiation dose on annealing behavior of defects in c-Si

XiangTi Meng
1994-01-01
Abstract:The annealing behavior of defects in FZ silicon grown in argon atmosphere and irradiated with different neutron doses had been studied by positron annihilation lifetime and Doppler broadening measurements. The radiation-induced monovacancy-type defects have very similar annealing behavior for FZ silicon irradiated with different neutron doses, and can be annealed out at 550��C, but the concentration of radiation-induced divacancy, the production, concentration and annealing out temperature of secondary divacancy and quadrivacancy type defects are quite different. The simple trapping model seems not suitable for FZ silicon irradiated with high neutron dose and annealed at the temperature lower than 500��C, however it is suitable partially for that irradiated with middle neutron dose.
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