Annealing Behavior of Defects in Neutron-Transmutation-Doped Floating Zone Si

XT MENG
DOI: https://doi.org/10.1143/jjap.33.2444
IF: 1.5
1994-01-01
Japanese Journal of Applied Physics
Abstract:Positron annihilation measurements show that in neutron-transmutation-doped floating zone (NTD FZ) Si irradiated by two different neutron doses-6×1016and 1.2×1018cm-2, the outline of the annealing behavior of V-type defects is similar, and this defect has two obvious annealing stages; but the annealing temperature of V2-type defects is very different from each other; the concentration and annealing behavior of the radiation-induced defects and secondary V2defects are related to the neutron dose. Above 600°C some V-type defects appear again.
What problem does this paper attempt to address?