Interaction of hydrogen with neutron-induced vacancy defects in Si

Xiang-Ti Meng
DOI: https://doi.org/10.1016/0038-1098(94)90042-6
IF: 1.934
1994-01-01
Solid State Communications
Abstract:In hydrogen containing FZ Si irradiated with a reactor neutron dose of 1.2 x 10(18) cm-2 about 20% neutron-induced V-type defects are decorated by hydrogen atoms; and very striking "false annealing out" of V-type defects at 200-degrees-C due to hydrogen passivation is found. At RT-200-degrees-C, the annealing out of V2 defects becomes slower and apparent concentration of the secondary V2 defects reaches the maximum value at lower temperature since a part Of V2 defects are also decorated by hydrogen. The maximum concentration may be independent of hydrogen and only related to neutron dose or the concentration of V2 defects in disordered regions. Hydrogen promotes annealing out of V-type and secondary V2 defects, and impedes the formation of multivacancy clusters. At 600-degrees-C reappearance of V-type defects is due to breaking of Si-H bonds for neutron-irradiated Si containing hydrogen and so-called "600-degrees-C acceptor" for neutron-irradiated Si grown at argon atmosphere, respectively.
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