Annealing Behaviour of Defects in Neutron Transmutation Doped Silicon

XT MENG,S CHARALAMBOUS,M CHARDALAS,SP DEDOUSSIS,CA ELEFTHERIADIS,AK LIOLIOS
DOI: https://doi.org/10.1080/10420159508225761
1995-01-01
Radiation Effects and Defects in Solids
Abstract:Defect evolution in Neutron Transmutation Doped Czochralski-grown Si has been studied by positron annihilation and electrical measurements with respect to the annealing temperature up to 1100 degrees C. Three annealing stages have been revealed depending on the annealing behaviour of vacancy and vacancy-impurity complexes.
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