Vacancy-Type Defects in Neutron-Irradiated Silicon

XT MENG
DOI: https://doi.org/10.1088/0256-307x/10/10/009
1993-01-01
Chinese Physics Letters
Abstract:Positron annihilation measurements show that the radiation defects and secondary defects in neutron-transmutation-doped (NTD) Si irradiated by two neutron doses can be removed at 600-650°C. The concentration and annealing behavior of V-type and V2 defects are related to the neutron doses. V4 appears at 150°C and 450°C-550°C in NTD Si irradiated by higher neutron dose.
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