Initial Surface Reactions Mechanisms of Atomic Layer Deposition Tio2 Using Ti(Och3)(4) and H2o As Precursors

Guangfen Zhou,Jie Ren,Shaowen Zhang
DOI: https://doi.org/10.4028/www.scientific.net/amr.785-786.832
2013-01-01
Advanced Materials Research
Abstract:The initial surface reaction mechanisms of atomic layer depositionTiO(2) using Ti(OCH3)(4) and H2O as the precursors are investigated by density functional theory. The ALD process is divided into two half-reactions, i.e., Ti(OCH3)(4) and H2O half-reactions. The adsorption of Ti(OCH3)(4) on OH/Si(100)-2x1 surface is exothermic. However, the overall reaction of Ti(OCH3)(4) is endothermic. In addition, H2O half-reactions are endothermic and thermodynamically unfavorable.
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