Investigation of strain and thin film relaxation in Ge xSi 1-x/Si strained-layer superlattice by dark-field electron holography

Zhifeng Wang,Yuan Yao,Xiaoqing He,Yang Yang,g u lin,Yanguo Wang,Xiaofeng Duan
DOI: https://doi.org/10.2320/matertrans.M2012138
2012-01-01
MATERIALS TRANSACTIONS
Abstract:Elastic strain plays an important role in modifying physical properties such as the mobility of charge carriers in semiconductors. Strain analyses reveal that the reduction of the total strain and the elastic strain could be as large as 30 and 65%, respectively in a very thin transmission electron microscopy (TEM) specimen. The strain and thin film relaxation in a cross-sectional transmission electron microscopy (XTEM) specimen of GeSi/Si strained-layer superlattice has been investigated by dark-field electron holography with a large holographic field of view (FOV) to 150 nm achieved by moving the specimen down below the front-focal plane of the objective lens in free lens control mode. [doi:10.2320/matertrans.M2012138]
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