Multiple-State Storage Capability of Stacked Chalcogenide Films (si 16 Sb 33 Te 51 /si 4 Sb 45 Te 51 /si 11 Sb 39 Te 50 ) for Phase Change Memory

Lai Yun-Feng,Feng Jie,Qiao Bao-Wei,Huang Xiao-Gang,Cai Yan-Fei,Lin Yin-Yin,Tang Ting-Ao,Cai Bing-Chu,Chen Bomy
DOI: https://doi.org/10.1088/0256-307x/23/9/046
2006-01-01
Chinese Physics Letters
Abstract:The multiple-stage storage capability of phase change memory (PCM) is confirmed by using stacked chalcogenide films as storage medium. The current-voltage characteristics and the resistance-current characteristics of the PCM clearly indicate that four states can be stored in this stacked film structure. Qualitative analysis indicates that the multiple-state storage capability of this stacked film structure is due to successive crystallizations in different Si-Sb-Te layers triggered by different amplitude currents.
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