Nano-crystalline phase change memory with composite Si-Sb-Te film for better data retention and lower operation current

y y lin,hangbing lv,peng zhou,ming yin,f f liao,y f cai,t a tang,j feng,yu zhang,z f zhang,b w qiao,y f lai,b c cai,bing chen
DOI: https://doi.org/10.1109/NVSMW.2007.4290581
2007-01-01
Abstract:Si-Sb-Te (SST) system materials were investigated for non-volatile phase change memory application. By contrast to the conventional GST films, the SST films exhibit stronger thermal stability and smaller RESET current, which were resulted from the self-confine and self-heat mechanisms by the amorphous Si-rich regions surrounding the phase change crystalline in SST. It shows a good promise for non-volatile memory applications.
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