Local Structure of Ge Nanocrystals Embedded in SiO2 Studied by Fluorescence EXAFS Technique

YAN Wensheng,SUN Zhihu,A.V. KOLOBOV,WEI Shiqiang
DOI: https://doi.org/10.3321/j.issn:0253-3219.2006.09.002
2006-01-01
Abstract:The fluorescence extended X-ray absorption fine structure (EXAFS) technique was used to study the local structure of Ge nanocrystals embedded in SiO2 matrix, which were synthesized by the magnetron sputtering co-deposition. It is revealed that in the as-prepared samples, Ge atoms mainly exist in the form of amorphous phases of Ge and GeO2. The sample with Ge mole fraction of 25% is mainly composed of the GeO2 phase. Upon annealing at 1073 K, Ge nanocrystals are formed. In the sample of 25% Ge (mole fraction), Ge nanocrystals come from amorphous Ge phase; while in the sample of 60% Ge (mole fraction), Ge atoms come from both GeO2 and amorphous Ge phase. A further analysis of the sample containing 60% Ge (mole fraction) shows that about 20% GeO2 (mole fraction) is turned into Ge nanocrystals due to the reduction reaction with Si atoms coming from the substrate.
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