Relationship Between X-ray Intensity and Electric Bias on Al2O3 Surface During Low Energy Ga+ Irradiation

Jiancun Rao,Minghui Song,Renchao Che,Masaki Takeguchi,Kazuo Furuya
DOI: https://doi.org/10.2320/matertrans.47.861
2006-01-01
MATERIALS TRANSACTIONS
Abstract:Low-energy characteristic X-ray emission is detected during bombardment of positive low energy ions onto insulator materials. The phenomenon is considered to be related to surface charge-up. To study further the mechanism, the characteristic X-rays was studied during 30 keV Ga+ ions bombardment onto Al2O3 monocrystalline specimens applied with a direct current (DC) bias in the present work. The applied DC voltage builds an electric field parallel to the surface of the specimen. The results show that the characteristic X-rays of O-K alpha and Al-K alpha increased with the increasing of the applied DC voltages.
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