On OCRA: response to comments by Wang and Wang (2005)

C. Parkan

DOI: https://doi.org/10.1057/palgrave.jors.2602083

IF: 3.6

2006-05-10

Journal of the Operational Research Society

Abstract:

What problem does this paper attempt to address?

Atomic Investigation on the Facet‐Dependent Melting of Ceramic Nanostructures Via in Situ Electron Irradiation

Bo Arixin,Liu Qiong,Zhan Haifei,Shi Xiaolei,Chen Zhi-Gang,Gu Yuantong

DOI: https://doi.org/10.1002/admi.202000288

IF: 5.4

2020-01-01

Advanced Materials Interfaces

Abstract:Thermodynamic behavior investigations on nanomaterials are of great scientific interest and possess technological implications for advancing nanoscience and nanotechnology. However, nanoscale thermodynamic studies on ceramic semiconductors are faced with great challenges due to their thermostability, and there lacks a percipient understanding of their atomistic thermal behaviors. Here, the atomic‐scale mechanism of the melting and coalescence processes of binary semiconductors, including rutile TiO2(R) and SnSe nanostructures, via real‐time electron beam (e‐beam) irradiation is reported. Under the e‐beam, the inelastic electron‐matter interactions and the low thermal conductivity of the samples cause a local temperature increase. The in situ melting process is recorded via high‐resolution TEM imaging, which exclusively shows a specific planar melting order of the (001), (011), and (100) for TiO2(R). This measurement provides direct evidence that matches the surface energy differences predicted by existing theoretical calculations and experiments. A similar phenomenon is induced and observed on SnSe, which derives a particular melting order of (210), (211), and (002). Furthermore, the in situ melting and coalescence analysis of ultrafine TiO2(R) nanoparticles suggests surface atom transfer and recrystallization as observed. The demonstration of e‐beam directed shape formation and tailoring reveals the possibility for nano/microscale processing of ceramic nanostructures, which are otherwise considered chemically stable and mechanically robust.
Electron Imaging of Nanoscale Charge Distributions Induced by Femtosecond Light Pulses

Jonathan T. Weber,Sascha Schäfer

2024-02-13

Abstract:Surface charging is a phenomenon ubiquitously observable in in-situ transmission electron microscopy of non-conducting specimens as a result of electron beam/sample interactions or optical stimuli and often limits the achievable image stability and spatial or spectral resolution. Here, we report on the electron-optical imaging of surface charging on a nanostructured surface following femtosecond-multiphoton photoemission. By quantitatively extracting the light-induced electrostatic potential and studying the charging dynamics on the relevant timescales, we gain insights into the details of the multi-photon photoemission process in the presence of a background field. We study the interaction of the charge distribution with the high-energy electron beam and secondary electrons and propose a simple model to describe the interplay of electron- and light-induced processes. In addition, we demonstrate how to mitigate sample charging by simultaneous optical illumination of the sample.

Mesoscale and Nanoscale Physics,Optics
Charging effect induced by electron beam irradiation: a review

Z.J. Ding,Chao Li,Bo Da,Jiangwei Liu

DOI: https://doi.org/10.1080/14686996.2021.1976597

IF: 7.821

2021-11-11

Science and Technology of Advanced Materials

Abstract:Charging effect frequently occurs when characterizing nonconductive materials using electrons as probes and/or signals and can impede the acquisition of useful information about the material under investigation. It is not adequate to investigate it merely by experiments, but theoretical investigations, for which the Monte Carlo method is a suitable tool, are also necessary. In this paper we review Monte Carlo simulations and selected experiments, intending to provide general insight into the charging effects induced by electron beam irradiation. We will introduce categories of the charging effect, the theoretical framework that is adopted in Monte Carlo modeling of the charging effect and present some typical simulation results. At last, with the knowledge on charging effect imparted by the above contents, we will discuss the measures that can be used for minimizing it.Graphical

materials science, multidisciplinary
Total-Ionizing-Dose Effects on Al/SiO2 Bimorph Electrothermal Microscanners

Wenjun Liao,En Xia Zhang,Michael L. Alles,Andrew L. Sternberg,Charles N. Arutt,Dingkang Wang,Simeng E. Zhao,Pan Wang,Michael W. McCurdy,Huikai Xie,Daniel M. Fleetwood,Robert A. Reed,Ronald D. Schrimpf

DOI: https://doi.org/10.1109/tns.2018.2853139

IF: 1.703

2018-01-01

IEEE Transactions on Nuclear Science

Abstract:Total-ionizing-dose effects on electrothermal microscanners are investigated using 10-keV X-rays and 14.3-MeV oxygen ions. The corresponding changes in mechanical displacement are measured using an optical microscope. Applied dc voltage and/or radiation-induced charging lead to changes in the vertical position and resistance of the structures. Radiation-induced changes in the vertical position and resistance and postirradiation recovery or superrecovery of these quantities are sensitive to de biases applied during and/or after irradiation. Simple electrostatic and computational models are qualitatively consistent with observed trends in device response.
Surface potential distribution of resist exposed by electron beam and the non-charging exposure conditions

Masatoshi Kotera,Yoshinobu Kono

DOI: https://doi.org/10.1093/jmicro/dfae044

2024-09-20

Abstract:In this study, we experimentally analyzed the charging phenomenon when an insulating resist film on a conductive layer formed on bulk glass is irradiated by electron beams. To quantify the charging potential induced, an electrostatic force microscope device was installed in the scanning electron microscope sample chamber, and potential distributions formed under various exposure conditions were obtained. Based on the results obtained, a model for charge accumulation within the sample, explaining positive and negative charging and their transitions, was developed. At an electron beam acceleration voltage of 30 kV, the following observations were made: "global charging" could be avoided by applying -5V to the sample. Regarding "local charging" near the exposure area of the electron beam, at low exposure doses, emission of secondary electrons from the sample surface induced positive charging, while the accumulation of incident electrons within the sample induced negative charging. At exposure doses where the effects of both are balanced, the sample exhibited zero potential, revealing the appearance of the "first zero-cross exposure dose". At higher exposure doses, the sample transitions from negative to positive as the exposure dose increases due to the electron beam induced conduction, resulting in the so-called "second zero-cross exposure dose". The exposure dose dependence of the charging potential distribution at various acceleration voltages was obtained. In particular, we found that at an acceleration voltage of 0.6 kV, the sample surface is not charged even when exposed to small to very large doses of electron beams.
Imaging Simulation of Charged Nanowires in TEM with Large Defocus Distance.

Te Shi,Shikai Liu,H. Tian,Z. J. Ding

DOI: https://doi.org/10.1093/jmicro/dfab008

2021-01-01

Microscopy

Abstract:In transmission electron microscope (TEM), both the amplitude and the phase of electron beam change when electrons traverse a specimen. The amplitude is easily obtained by the square root of the intensity of a TEM image, while the phase affects defocused images. In order to obtain the phase map and verify the theoretical model of the interaction between electron beam and specimen, a lot of simulations have to be performed by researchers. In this work, we have simulated defocus images of a SiC nanowire in TEM with the method of electron optics. Mean inner potential and charge distribution on the nanowire have been considered in the simulation. Besides, due to electron scattering, coherence loss of the electron beam has been introduced. A dynamic process with Bayesian optimization was used in the simulation. With the infocus image as input and by adjusting fitting parameters, the defocus image is determined with a reasonable charge distribution. The calculated defocus images are in a good agreement with the experimental ones. Here, we present a complete solution and verification method for solving nanoscale charge distribution in TEM.
Measurement of electron beam induced sample heating in SEM experiments

Christina Koenig,Alice Bastos da Silva Fanta,Joerg R. Jinschek

2024-12-04

Abstract:Scanning Electron Microscopy (SEM) experiments provide detailed insights into material microstructures, enabling high-resolution imaging as well as crystallographic analysis through advanced techniques like Electron Backscatter Diffraction (EBSD). However, the interaction of the high-energy electron beam with the material can lead to localized heating, which may significantly impact specimen integrity, especially in applications requiring prolonged beam exposure, for instance when mapping the crystal structure using EBSD. This study examines electron-beam-induced heating effects on a model metal sample (iron), directly measuring the locally deposited electron beam energy with a MEMS-based heating device and validating these measurements through simulations, including Monte Carlo and Finite Element methods. The analysis focuses on the effects of various experimental parameters such as acceleration voltage (from 5 to 30 kV), beam current (from 0.17 nA to 22 nA), dwell time (from 1$\mu$s to 1ms) and sample tilt (0° to 70°). The findings reveal that local sample temperatures can increase by up to 70 °C during EBSD experiments, primarily affected by the choice in beam current and acceleration voltage, with beam current having the most significant impact.

Materials Science,Applied Physics
Space charge measurement in a dielectric material after irradiation with a 30 kV electron beam: Application to single-crystals oxide trapping properties

B. Vallayer,G. Blaise,D. Treheux

DOI: https://doi.org/10.1063/1.1149887

IF: 1.6

1999-07-01

Review of Scientific Instruments

Abstract:When an insulating material is subjected to electron irradiation, it produces a secondary emission the yield of which varies from a few percent to very high values (up to 24 per incoming electron) depending on the material and the experimental conditions. If the secondary electron emission yield is less than one, a net negative charge remains trapped in the sample. In this case, the study of the electric charges trapping properties of the material becomes possible. This article describes how it is possible to use a secondary electron microscope (SEM) as a device to perform such a study. In Sec. II, the effect of a net negative trapped charge resulting (from the injection of typically 50 pC) on the imaging process of the SEM has been described. It has been shown that when the trapped charge is high enough, it acts as a mirror reflecting the incoming electron beam which is deflected somewhere in the vacuum chamber of the microscope. A global qualitative description of the image displayed on the screen is first presented. Then electron trajectories are quantitatively studied by using the Rutherford scattering cross section in the case of a point charge. When the charge is extended, a numeric simulation has been done in order to predict the validity range of the previous model. Once the trajectories have been calculated, the connection between the remarkable elements of the image and the quantity of trapped charges has been established. Moreover, this technique allows one to study the lateral dimension of the trapped charge zone and to measure the surface potential. In Sec. III, the discussion is first focused on some precautions to be taken concerning the sample preparation before the experiment is performed. It has been shown that surface defects due either to contamination layers or machining change the trapping properties of single-crystals ceramics such as MgO and Al2O3. A cleaning procedure is proposed that consists of annealing the sample at 1500 °C for 4 h in order to heal the crystalline defects and a heating at 400 °C in the vacuum chamber of the SEM to remove the contamination layers. Finally, the effect of the temperature on the trapping properties of pure and chromium doped sapphire has been studied in relation with the chromium concentration. It is shown that temperature behavior of trapping is in relation with the chromium concentration. In the pure sapphire trapping is activated below −16 °C, in 500 ppm rubis it is below −9.5 °C due to isolated chromium atoms, and in the 8000 ppm rubis the critical trapping temperature rises to 3.7 °C due to Cr3+ pairs. The interpretation of the role played by chromium on trapping is based on the experimental study of the fluorescence of chromium atoms and pairs as a function of concentration.

instruments & instrumentation,physics, applied
Self‐consistent charging of PMMA thin film induced by a penetrating electron beam in electron microscopy

Wei‐Qin Li,Jun Qian

DOI: https://doi.org/10.1111/jmi.12992

IF: 1.9522

2021-01-04

Journal of Microscopy

Abstract:<p>The charging of the polymer thin film irradiated by penetrating electron beam (e‐beam) is investigated, in parallel with the numerical simulation and experiment. The simulation is performed by combining scattering, drift, diffusion, trapping and recombination. Results show that, due to the electron emission the net charge near the surface is distribution positively, but negatively inside the film because of low electron mobility. The surface potential is positive near surface and accordingly forces some of secondary electrons to return surface. As irradiation proceeds, currents flowing into and out of the film can tend to equilibrium. In the equilibrium state, with increasing beam energy, the surface potential and the efficient emission current decrease, and the electron beam induced current and the transmission current tend to zero and the beam current valuable, respectively. E‐beams of from 10 keV to 30 keV cause positive charging on PMMA film of 2 μm, which means the high‐energy e‐beam can effectively discharge a thin film that has been charged negatively by irradiation with low‐energy e‐beam. With the increase of the film thickness from 1 μm to 3 μm, the positive surface potential and the emission current decreases and increases respectively, and the transmission current tends to zero.</p><p>This article is protected by copyright. All rights reserved</p>

microscopy
Incidence Angle Effect on Oxide Charge Kinetics

Jaber, Hawra Hedi

DOI: https://doi.org/10.1007/s11182-024-03272-4

2024-09-27

Russian Physics Journal

Abstract:This article presents a detailed study of the variation of secondary electron emission as a function of the primary energy. This study is performed with a dedicated scanning electron microscope on the electrical property evolution of the magnesium oxide (100) single crystal. It is shown that the crystalline orientation has a significant influence on the intrinsic secondary electron emission at low energies below 7 keV, but for high energies, the loss function of the secondary energy extending more deeply, disperses before its release. As the incidence angle of the primary beam energy differs from the normal and takes important values, the secondary electron yield increases. The increase in the incidence angle has a similar and complementary effect on the current density growth.

physics, multidisciplinary
Effects of heat and electron irradiation on the melting behavior of Al-Si alloy particles and motion of the Al nanosphere within

James M Howe,Takeshi Yokota,Mitsuhiro Murayama,William A Jesser

DOI: https://doi.org/10.1093/jmicro/53.2.107

Abstract:In situ heating and electron-beam irradiation in the transmission electron microscope were performed to study melting of Al-11.6 at.% Si alloy submicron particles supported on an amorphous-C thin film. It was found that electron irradiation could be used to melt the particles, even when the hot-stage specimen holder was kept at a much lower temperature than the bulk melting point (i.e. the eutectic temperature) of the particles. The critical current densities required to achieve partial melting increased linearly with the incident electron-beam energy for a given temperature. Comparison between this behavior and analytical calculations indicates that melting under electron-beam irradiation is caused by a temperature rise due to electron thermal spikes in the particles and poor thermal conduction away from the particles. The motion of the crystalline Al nanosphere inside the partially molten particles was also investigated, using the electron beam to both stimulate and observe the motion of the nanosphere. The irregular motion observed was quantified as antipersistent fractional Brownian motion. Analysis of possible phenomena contributing to the motion demonstrates that the incident electrons provide the fractional force that moves the Al nanosphere, and that gravity and the oxide shell on the partially molten particle cause the antipersistent behavior. Another interesting phenomenon observed in this study was that the crystalline Al nanosphere inside the partially molten Al-Si alloy particle followed a focused electron beam as it was moved about on the partially molten particle. This observation suggests that it may be possible to manipulate metallic nanospheres inside opaque liquids using an electron beam.
Charge-state distribution of aerosolized nanoparticles

Jannik Lübke,Nils Roth,Lena Worbs,Daniel A. Horke,Armando D. Estillore,Amit K. Samanta,Jochen Küpper

DOI: https://doi.org/10.48550/arXiv.2108.04710

2021-08-10

Abstract:In single particle imaging experiments, beams of individual nanoparticles are exposed to intense pulses of x-rays from free-electron lasers to record diffraction patterns of single, isolated molecules. The reconstruction for structure determination relies on signal from many identical particles. Therefore, well-defined-sample delivery conditions are desired in order to achieve sample uniformity, including avoidance of charge polydispersity. We have observed charging of 220 nm polystyrene particles in an aerosol beam created by a gas-dynamic virtual nozzle focusing technique, without intentional charging of the nanoparticles. Here, we present a deflection method for detecting and characterizing the charge states of a beam of aerosolized nanoparticles. Our analysis of the observed charge-state distribution using optical light-sheet localization microscopy and quantitative particle trajectory simulations is consistent with previous descriptions of skewed charging probabilities of triboelectrically charged nanoparticles.

Chemical Physics,Atomic and Molecular Clusters
Experiments on the Electrostatic Transport of Charged Anorthite Particles under Electron Beam Irradiation

Hong Gan,Xiaoping Zhang,Xiongyao Li,Hong Jin,Lianghai Xie,Yongliao Zou

DOI: https://doi.org/10.3847/1538-4357/ac5d48

2022-05-04

Abstract:To reveal the effect of secondary electron emission on the charging properties of a surface covered by micron-sized insulating dust particles and the migration characteristics of these particles, for the first time we used a laser Doppler method to measure the diameters and velocities of micron-sized anorthite particles under electron beam irradiation with an incident energy of 350 eV. Here, anorthite particles are being treated as a proxy for lunar regolith. We experimentally confirm that the vertical transport of anorthite particles is always dominant, although horizontal transport occurs. In our experiments, some anorthite particles were observed to have large vertical velocities up to 9.74 m s −1 at the measurement point. The upper boundary of the vertical velocities V z of these high-speed anorthite particles are well constrained by its diameter D, that is, V z 2 linearly depends on D −2 . These velocity–diameter data provide strong constraints on the dust charging and transportation mechanisms. The shared charge model could not explain the observed velocity–diameter data. Both the isolated charge model and patched charge model appear to require a large dust charging potential of −350 to −78 V to reproduce the observed data. The microstructures of the dusty surface may play an important role in producing this charging potential and in understanding the pulse migration phenomenon observed in our experiment. The presented results and analysis in this paper are helpful for understanding the dust charging and electrostatic transport mechanisms in airless celestial bodies such as the Moon and asteroids in various plasma conditions.

astronomy & astrophysics
Simulation of electron transport in electron beam induced deposition of nanostructures

Francesc Salvat-Pujol,Harald O. Jeschke,Roser Valenti

DOI: https://doi.org/10.48550/arXiv.1303.1739

2013-03-07

Mesoscale and Nanoscale Physics

Abstract:We present a numerical investigation of energy and charge distributions during electron-beam-induced growth of W nanostructures on SiO2 substrates using Monte Carlo simulation of electron transport. This study gives a quantitative insight into the deposition of energy and charge in the substrate and in already existing metallic nanostructures in the presence of the electron beam. We analyze electron trajectories, inelastic mean free paths, and distribution of backscattered electrons in different deposit compositions and depths. We find that, while in the early stages of the nanostructure growth a significant fraction of electron trajectories still interact with the substrate, as the nanostructure becomes thicker the transport takes place almost exclusively in the nanostructure. In particular, a larger deposit density leads to enhanced electron backscattering. This work shows how mesoscopic radiation-transport techniques can contribute to a model which addresses the multi-scale nature of the electron-beam-induced deposition (EBID) process. Furthermore, similar simulations can aid in understanding the role played by backscattered electrons and emitted secondary electrons in the change of structural properties of nanostructured materials during post-growth electron-beam treatments.
Dynamic evolution investigation on the dielectric surface charging under electron irradiation with various energy distributions

Jiyuan Wang,Yanan Xu,Zhuoxi Lian,Dan Wang,Xiangchen Meng,Nan Zhou,Yongning He

DOI: https://doi.org/10.1016/j.rinp.2024.107339

IF: 4.565

2024-01-12

Results in Physics

Abstract:Spacecrafts face various environmental risks in their working durations, thereinto, surface charging, which may result in abnormal operation of devices, is a typical detrimental effect and deserves to be deeply investigated, especially the charging process under various electron energy distributions. In this work, aiming to reveal the evolution process of surface charging in detail, we establish an approach for predicting surface potential under electron irradiation by considering the electron emission process. Mathematical relationships for the dependence of surface charging on the secondary electron yield properties of dielectric surfaces are established. The dynamic process of surface potential evolution is calculated for MgO and Al 2 O 3 when the energy variation of incident electrons obeys uniform distribution, Gaussian distribution, and Maxwell distribution. By analyzing the dynamic equilibrium process of electron incidence/exit in the positively/negatively charged cases, the effect of electron energy on equilibrium surface potential and equilibrium time are quantitatively calculated. It is found that the surface potential will be a dozen volts when the surface is positively charged, surface charging of this magnitude does not have a noticeable effect, and the equilibrium time is short (several microseconds). However, the surface potential may reach very high levels (thousands of volts) leading to breakdowns when the dielectric surface is negatively charged, and its equilibrium time is 3 to 4 orders of magnitude higher than the positively charged case. Via calculating the surface potential under various incident distributions, we acquire the dynamic evolution process of surface potential evolution under different energy distributions, and find its consequence shows a similar tendency for the situation of constant energy irradiation. This work digs into the mechanism of surface charging under various irradiation situations, which makes sense for further works involving surface charging induced by electron irradiation with multiple energy distributions.

physics, multidisciplinary,materials science
Synthesis and pharmacological properties of some quinoline derivatives.

B. Kalluraya,S. Sreenivasa

DOI: https://doi.org/10.1016/S0014-827X(98)00037-8

1998-06-30

Il Farmaco

Abstract:
Septate junctions between digestive vacuoles in human malacoplakia.

M. Nistal,E. Echandía,R. Paniagua

DOI: https://doi.org/10.1016/0040-8166(78)90012-5

Abstract:
Particle charging during pulsed EUV exposures with afterglow effect

M. Chaudhuri,L. C. J. Heijmans,M. van de Kerkhof,P. Krainov,D. Astakhov,A. M. Yakunin

2023-03-26

Abstract:The nanoparticle charging processes along with background spatial-temporal plasma profile have been investigated with 3DPIC simulation in a pulsed EUV exposure environment. It is found that the particle charge polarity (positive or negative) strongly depends on its size, location and background transient plasma conditions. The particle (100 nm diameter) charge reaches steady state in a single pulse (20 us) within the EUV beam in contrast to particles outside the beam that requires multiple pulses. The larger the particle size, the less number of pulses are required to reach steady state. It is found that the charge of a particle decreases with pressure in a faster rate outside the beam compared to inside. The results are of importance for particle contamination (defectivity) control strategy for EUV lithography machines.

Plasma Physics
Electron Beam Effects on Oxide Thin Films—Structure and Electrical Property Correlations

Krishna Kanth Neelisetty,Xiaoke Mu,Sebastian Gutsch,Alexander Vahl,Alan Molinari,Falk von Seggern,Mirko Hansen,Torsten Scherer,Margit Zacharias,Lorenz Kienle,VS Kiran Chakravadhanula,Christian Kübel

DOI: https://doi.org/10.1017/S1431927619000175

IF: 4.0991

2019-10-07

Microscopy and Microanalysis

Abstract:In situ transmission electron microscope (TEM) characterization techniques provide valuable information on structure–property correlations to understand the behavior of materials at the nanoscale. However, understanding nanoscale structures and their interaction with the electron beam is pivotal for the reliable interpretation of in situ / ex situ TEM studies. Here, we report that oxides commonly used in nanoelectronic applications, such as transistor gate oxides or memristive devices, are prone to electron beam induced damage that causes small structural changes even under very low dose conditions, eventually changing their electrical properties as examined via in situ measurements. In this work, silicon, titanium, and niobium oxide thin films are used for in situ TEM electrical characterization studies. The electron beam induced reduction of the oxides turns these insulators into conductors. The conductivity change is reversible by exposure to air, supporting the idea of electron beam reduction of oxides as primary damage mechanism. Through these measurements we propose a limit for the critical dose to be considered for in situ scanning electron microscopy and TEM characterization studies.

materials science, multidisciplinary,microscopy

On OCRA: response to comments by Wang and Wang (2005)

Atomic Investigation on the Facet‐Dependent Melting of Ceramic Nanostructures Via in Situ Electron Irradiation

Electron Imaging of Nanoscale Charge Distributions Induced by Femtosecond Light Pulses

Charging effect induced by electron beam irradiation: a review

Total-Ionizing-Dose Effects on Al/SiO2 Bimorph Electrothermal Microscanners

Surface potential distribution of resist exposed by electron beam and the non-charging exposure conditions

Imaging Simulation of Charged Nanowires in TEM with Large Defocus Distance.

Measurement of electron beam induced sample heating in SEM experiments

Space charge measurement in a dielectric material after irradiation with a 30 kV electron beam: Application to single-crystals oxide trapping properties

Self‐consistent charging of PMMA thin film induced by a penetrating electron beam in electron microscopy

Incidence Angle Effect on Oxide Charge Kinetics

Effects of heat and electron irradiation on the melting behavior of Al-Si alloy particles and motion of the Al nanosphere within

Charge-state distribution of aerosolized nanoparticles

Experiments on the Electrostatic Transport of Charged Anorthite Particles under Electron Beam Irradiation

Simulation of electron transport in electron beam induced deposition of nanostructures

Dynamic evolution investigation on the dielectric surface charging under electron irradiation with various energy distributions

Synthesis and pharmacological properties of some quinoline derivatives.

Septate junctions between digestive vacuoles in human malacoplakia.

Particle charging during pulsed EUV exposures with afterglow effect

Electron Beam Effects on Oxide Thin Films—Structure and Electrical Property Correlations