Investigation on High-Energy Electron Irradiation on GaN Heterostructure by EBSD

MA Tong-da,ZUO Yu-ting,ZHANG Zhi-hui,FU Xue-tao,ZHANG Chong-hong,ZHANG Li-qing,WANG Xin-qiang
DOI: https://doi.org/10.3969/j.issn.1000-6281.2011.04.017
2011-01-01
Abstract:GaN heterostructures were irradiated by 2MeV electron beam.The fluencies reached 1×1015/cm2 and 5×1015/cm2,respectively.IQ values of EBSD kikuchi patterns increased with the increasing of electron irradiation.The corresponding strain or distortion of the surface decreased.SEM/EDS analysis showed that oxygen atoms enriched within the epilayers,which was attributed to the attraction from the damaged lattice by electron irradiation.It was assumed that the evolution of strain status was related to impurity diffusion and introduction of point defects,among of which lattice damage played the major role in the whole process.
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