Characteristics of High-Energy N+-Implanted Damage in Gasb

YX ZHENG,YH QIAN,LY CHEN,SM ZHOU,YD WANG,CL LIN,ZP HE,AS ZHENG
DOI: https://doi.org/10.1016/0038-1098(95)00425-4
IF: 1.934
1995-01-01
Solid State Communications
Abstract:Characteristics of 2 MeV N+-implanted damage in GaSb samples with doses from 1 × 1013 cm−2 to 1 × 1015 cm−2 were studied by use of spectroscopic ellipsometry, Rutherford backscattering spectrometry in combination with the channeling technique, and scanning electron microscopy methods. When doses are greater than 3 × 1014 cm−2, the implanted layer becomes amorphous. But no swelling was observed on the implanted sample surfaces, as predicted by R. Callec. By rapid thermal annealing at 600°C for 25 s, a good recovery of the implanted layers has been achieved.
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