Abstract:Vertical GaN power devices have emerged to become promising candidates for next-generation high power applications due to superior material properties such as high breakdown voltage, low on-resistance, and high mobility compared to devices based on Si and SiC. GaN-based p-n junction switching devices enable higher voltage power with significantly higher efficiencies with added advantages of reduced size and weight systems. A technological limitation of GaN, however, has been the inability to achieve high p-type doping in a planar, vertical device. Here, we will focus on recent developments to achieve high p-type efficiency though ion implantation, novel high temperature annealing schemes, and the importance of defects and morphology in native substrates and epitaxial layers GaN epitaxial layers for subsequent p-type ion implantation can be grown on sapphire substrates but vertical devices are optimal when using GaN homoepitaxial structures. Unlike most other semiconductor substrates, GaN substrates are not grown from the melt. Hydride vapor phase epitaxy or ammonothermal growth are predominantly used to produce substrates and these substrates will experience higher temperatures during subsequent epitaxy and ion implant activation annealing than occurs during substrate formation. In both types of substrates, the threading dislocation distribution can vary by orders of magnitude – these variations correlate well with leakage currents in vertical devices. The activation of the implanted p-type dopants requires high temperature annealing. For most semiconductors, an annealing temperature of ~ 2/3 the melting point leads to a high activation fraction (> 95%) of the implanted species. The implantation process introduces large concentrations of native defects as well as the p-type implant (typically Mg), so it is necessary to remove the defects and for the dopants to locate on substitutional sites (Ga sites for Mg). We demonstrate how the formation of inverted domain defects at temperatures below 1400 °C correlate with Mg-compound formation, whereas annealing temperatures 1400 °C and above do not lead to the formation of such compounds but rather high Mg activation efficiencies. These recent developments, partly through the ARPA-E PNDIODES program as well as international efforts, have brought understanding of the key processing steps and substrate requirements to achieve high activation efficiency p-type doping for planar, vertical device structures in a scalable framework.

Detail Study on Lattice Deformation and Recovery of GaN by Mg-ion-implantation and the Subsequent Thermal Annealing

Study of Radiation Damage in Mg+-implanted GaN

Research on Evolution of Relevant Defects in Heavily Mg-Doped GaN by H Ion Implantation Followed by Thermal Annealing

High Mg activation in implanted GaN by high temperature and ultrahigh pressure annealing

Property Manipulation Through Pulsed Laser Annealing in High Dose Mg-implanted GaN

(Invited) Understanding Mg-Related Defects for Vertical GaN p-n Junction Structures Via p-Type Ion Implantation

Unidirectional Expansion of Lattice Parameters in GaN Induced by Ion Implantation

Dissolution of Mg-enriched defects in implanted GaN and increased p-type dopant activation

Atomic-scale investigation of implanted Mg in GaN through ultra-high-pressure annealing

High Pressure Processing of Ion Implanted GaN

Defects in GaN Films Studied by Positron Annihilation Spectroscopy

Use of Sub-nanometer Thick AlN to Arrest Diffusion of Ion-Implanted Mg into Regrown AlGaN/GaN Layers

Atomic-scale characterization of structural damage and recovery in Sn ion-implanted β-Ga2O3

Process engineering of GaN power devices via selective-area p-type doping with ion implantation and ultra-high-pressure annealing

Modification of new photoelectric material GaN by implantation of H+, He+ and N+ ion beam

MOCVD growth and annealing characteristics of Mg-doped AlGaN films

Deep-level defects induced by implantations of Si and Mg ions into undoped epitaxial GaN

Nano-clusters structure and magnetic properties of high fluence Mn+ ion-implanted GaN

(Invited) Advancements in Vertical GaN p-n Junction Structures Via p-Type Ion Implantation

Molecular dynamics simulations and experimental studies on low-temperature growth of GaN

Highly effective activation of Mg-implanted p-type GaN by ultra-high-pressure annealing