Abstract:Vertical GaN power devices have emerged to become promising candidates for next-generation high power applications due to superior material properties such as high breakdown voltage, low on-resistance, and high mobility compared to devices based on Si and SiC. GaN-based p-n junction switching devices enable higher voltage power with significantly higher efficiencies with added advantages of reduced size and weight systems. A technological limitation of GaN, however, has been the inability to achieve high p-type doping in a planar, vertical device. Here, we will focus on recent developments to achieve high p-type efficiency though ion implantation, novel high temperature annealing schemes, and the importance of defects and morphology in native substrates and epitaxial layers GaN epitaxial layers for subsequent p-type ion implantation can be grown on sapphire substrates but vertical devices are optimal when using GaN homoepitaxial structures. Unlike most other semiconductor substrates, GaN substrates are not grown from the melt. Hydride vapor phase epitaxy or ammonothermal growth are predominantly used to produce substrates and these substrates will experience higher temperatures during subsequent epitaxy and ion implant activation annealing than occurs during substrate formation. In both types of substrates, the threading dislocation distribution can vary by orders of magnitude – these variations correlate well with leakage currents in vertical devices. The activation of the implanted p-type dopants requires high temperature annealing. For most semiconductors, an annealing temperature of ~ 2/3 the melting point leads to a high activation fraction (> 95%) of the implanted species. The implantation process introduces large concentrations of native defects as well as the p-type implant (typically Mg), so it is necessary to remove the defects and for the dopants to locate on substitutional sites (Ga sites for Mg). We demonstrate how the formation of inverted domain defects at temperatures below 1400 °C correlate with Mg-compound formation, whereas annealing temperatures 1400 °C and above do not lead to the formation of such compounds but rather high Mg activation efficiencies. These recent developments, partly through the ARPA-E PNDIODES program as well as international efforts, have brought understanding of the key processing steps and substrate requirements to achieve high activation efficiency p-type doping for planar, vertical device structures in a scalable framework.

Highly effective activation of Mg-implanted p-type GaN by ultra-high-pressure annealing

Atomic-scale investigation of implanted Mg in GaN through ultra-high-pressure annealing

High Mg activation in implanted GaN by high temperature and ultrahigh pressure annealing

Process engineering of GaN power devices via selective-area p-type doping with ion implantation and ultra-high-pressure annealing

Effect of annealing time and pressure on electrical activation and surface morphology of Mg-implanted GaN annealed at 1300 °C in ultra-high-pressure nitrogen ambient

Dissolution of Mg-enriched defects in implanted GaN and increased p-type dopant activation

Property Manipulation Through Pulsed Laser Annealing in High Dose Mg-implanted GaN

(Invited) Understanding Mg-Related Defects for Vertical GaN p-n Junction Structures Via p-Type Ion Implantation

High Pressure Processing of Ion Implanted GaN

(Invited) Advancements in Vertical GaN p-n Junction Structures Via p-Type Ion Implantation

Realization of P-Type Gallium Nitride by Magnesium Ion Implantation for Vertical Power Devices

Activation of p-GaN in a two-step rapid thermal anneaft process

Activation of Hydrogen-Passivated Mg in GaN-Based Light Emitting Diode Annealing with Minority-Carrier Injection

Depth Analyses of Mg‐Acceptor and Si‐Donor Concentrations in GaN by Combining Stepwise Etching and Photoluminescence

Study on MOCVD-Grown Mg-Doped GaN by Annealing Treatment

P-Type Doping Of Gan By Mg+ Implantation

Capacitively Coupled Plasma-Stimulated Room-Temperature Mg and Mn Doping and Electrical Activation in GaAs

Effect of High Temperature, High Pressure Annealing on GaN Drift Layers for Vertical Power Devices

Growth and Annealing Study of Mg-Doped AlGaN and GaN/AlGaN Superlattices

Non-Equilibrium Acceptor Concentration in Gan : Mg Grown by Metalorganic Chemical Vapor Deposition

Effects of low-temperature annealing on net doping profile of Mg-ion-implanted GaN studied by MOS capacitance–voltage measurement