Radiation-induced Damage in GaP by MeV Helium Ions

XY LI,HS CHENG,FJ YANG
DOI: https://doi.org/10.1088/1004-423x/3/2/005
1994-01-01
Abstract:The creation of defects in GaP bombarded with MeV 4He ions has been studied under ultra-high-vacuum condition by Rutherford backscattering/channeling (RBS/C) method, and the absolute damage cross section σd for GaP has been determined under bombardment of 1.0 MeV 4He ions, with the measured value 8.0×10-18 cm2. Our experimental results suggest that the defect generation rate is strongly related to the surface condition. When the GaP is covered with a thin amorphous layer, a significant ion beam annealing effect will be observed. The present results show that for GaP the damage is produced mainly by nuclear collision.
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