Damage Production and Annealing During Mev He Ion Rbs/Channeling Analysis of Gap

XY LI,HS CHENG,FJ YANG
DOI: https://doi.org/10.1088/0256-307x/11/4/008
1994-01-01
Abstract:The creation of defects in GaP bombarded with MeV He-4 ions has been studied under ultra-high-vacuum condition by Rutherford backscattering/channeling (RBS/C) method. Our experimental results suggest that the defect generation rate is strongly related to the surface condition. When the GaP is covered with a thin amorphous layer, a significant ion beam annealing effect will be observed. The present results show that for GaP the damage is produced mainly by nuclear collision.
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