MeV Ti ion-implantation-induced damages in LiNbO3

Sha Yan,Weijiang Zhao,Hongji Ma,Keming Wang,Shiling Li,Diyun Shen,Jianming Xue,Yugang Wang
2008-01-01
Journal of the Korean Physical Society
Abstract:MeV ion implantation can form a waveguide in LiNbO3 crystal because of the damage induced by collisions. Damage in LiNbO3 induced by 0.7-MeV similar to 2.6-MeV Ti ions at doses of 10(13) cm(-2) and 10(15) cm(-2) are studied by RBS-C (Channeling Rutherford Backscattering Spectroscopy) analysis and numerical simulation with SRIM (Stopping and Range of Ions in Matter) code. The influence of annealing damage distribution is discussed. The discussion also concerns the topic of the relation between damage distribution and formation of wave-guide.
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