Formation of optical waveguides in KNbO3 by MeV boron ion implantation

ZongHuang Xia,Yan Li,Diyun Shen,Xuemei Wang,Xiaoyan Ma,Dezhong Shen,Kuiru Wang

DOI: https://doi.org/10.1016/s0168-583x(96)00833-6

1997-01-01

Abstract:Planar optical wave guides were formed in KNbO3 by MeV boron ion implantation. The experimental results demonstrated that MeV heavy ion implantation in KNbO3 produces optical waveguides with high quality.

What problem does this paper attempt to address?

Planar Optical Waveguides in KNbO 3 Formed by MeV B and He Ion Implantation

Y Li,ZH Xia,DY Shen,XM Wang,Q Zhao,XY Ma,DZ Shen,KR Wang

DOI: https://doi.org/10.1088/0256-307x/16/10/011

1999-01-01

Chinese Physics Letters

Abstract:Planar optical waveguides in single crystals of KNbO3 were fabricated by MeV B and He ion implantation. The depth profiles of radiation damage in these waveguides were compared and analyzed by high resolution transmission electron microscope. Non leaky waveguiding modes (TE0 and TM0), which are due to implantation induced increase of n(b) and n(c), were observed in 6.0 MeVB ion implantated waveguides with a dose of 1 x 10(15) cm(-2).
Synthesis of optical-quality single-crystal β-BaB2O 4 microwires and nanowires

Guangyuan Qu,Zhifang Hu,Yipei Wang,Qing Yang,Limin Tong

DOI: https://doi.org/10.1002/adfm.201201866

IF: 19

2013-01-01

Advanced Functional Materials

Abstract:The synthesis of optical quality -barium borate microwires and nanowires (MNWs) is reported using an organic-free hydrothermal method with BaCl2 center dot 6H2O, NaOH, and H3BO3 as source materials, and assisted with post-annealing. As-synthesized MNWs, with diameters ranging from 500 nm to 2 m and lengths up to several hundred micrometers, show good optical-waveguiding capabilities. Based on evanescent coupling between a single BBO MNW waveguide and a fiber taper, propagation losses of 0.30 dB m1 (at 532 nm) and 0.21 dB m1 (at 671 nm) are evaluated, respectively. An evident second-harmonic generation (SHG) signal at 532 nm with a measured conversion efficiency of about 8.4% is observed when excited by waveguided 1064 nm, picosecond laser pulses within a BBO MNW with a length of the order of 100 m. The dependence of the SHG conversion efficiency on the MNW diameter is also investigated. These results show a much-higher SHG efficiency for BBO single-crystal MNWs compared with bulk crystal, which suggests potential applications in future micro-/nanoscale nonlinear optical applications such as optical modulation and frequency conversion.
Formation of optical planar waveguides on fused quartz by MeV ion implantation

José‐Miguel Zarate‐Reyes,Erick Flores‐Romero,Luis Rodríguez‐Fernández,Yuriy Kudriavtsev,Juan‐Carlos Cheang‐Wong

DOI: https://doi.org/10.1049/ote2.12114

IF: 1.691

2024-02-14

IET Optoelectronics

Abstract:Study of the formation of optical planar waveguides by means of MeV ion implantation in high‐purity fused quartz substrates. The optical effects of the ions (C, Si, and Cu) at energy in the range of 4–12 MeV are reported. Waveguides with low propagation losses even without post‐implantation annealing were obtained. The optical losses and the refractive index change of optical planar waveguides formed by MeV ion implantation were correlated with the experimental ion implantation parameters. Direct ion implantation was performed by means of carbon, silicon and copper ion beams impinging on the substrate surface at normal incidence. The ions were accelerated at energies ranging from 3 to 12 MeV with fluences varying from 1 × 1012 to 2 × 1016 ion/cm2, according to the type of implanted ion. The modification of the substrate refractive index due to the ion irradiation‐induced damage was evaluated using the prism coupler method, and the refractive index profiles were determined by means of a reconstruction method using a multilayer structure approximation. The guiding properties of the waveguides were analysed using the fibre‐coupling technique to determine both the optical transmission and transversal modes at 635 nm. The main practical relevance of our research is the obtention of high‐quality waveguides at low current density MeV ion implantation (≤80 nA/cm2) without post‐implantation annealing.

telecommunications,engineering, electrical & electronic,optics
Near-infrared Carbon-Implanted Waveguides in Tb3+-doped Aluminum Borosilicate Glasses

Yue Wang,Jiaxin Zhao,Qifeng Zhu,Jianping Shen,Zhongyue Wang,Hai-Tao Guo,Chunxiao Liu

DOI: https://doi.org/10.1007/s12200-019-0869-6

2019-01-01

Frontiers of Optoelectronics

Abstract:Ion implantation has played a unique role in the fabrication of optical waveguide devices. Tb3+-doped aluminum borosilicate (TDAB) glass has been considered as an important magneto-optical material. In this work, near-infrared waveguides have been manufactured by the (5.5 + 6.0) MeV C3+ ion implantation with doses of (4.0 + 8.0) × 1013 ions·cm-2 in the TDAB glass. The modes propagated in the TDAB glass waveguide were recorded by a prism-coupling system. The finite-difference beam propagation method (FD-BPM) was carried out to simulate the guiding characteristics of the TDAB glass waveguide. The TDAB glass waveguide allows the light propagation with a single-mode at 1.539 μm and can serve as a potential candidate for future waveguide isolators.
MeV Ti ion-implantation-induced damages in LiNbO3

Sha Yan,Weijiang Zhao,Hongji Ma,Keming Wang,Shiling Li,Diyun Shen,Jianming Xue,Yugang Wang

2008-01-01

Journal of the Korean Physical Society

Abstract:MeV ion implantation can form a waveguide in LiNbO3 crystal because of the damage induced by collisions. Damage in LiNbO3 induced by 0.7-MeV similar to 2.6-MeV Ti ions at doses of 10(13) cm(-2) and 10(15) cm(-2) are studied by RBS-C (Channeling Rutherford Backscattering Spectroscopy) analysis and numerical simulation with SRIM (Stopping and Range of Ions in Matter) code. The influence of annealing damage distribution is discussed. The discussion also concerns the topic of the relation between damage distribution and formation of wave-guide.
Monomode Optical Planar and Channel Waveguides in Yb3+-doped Silicate Glasses Formed by Helium Ion Implantation

Chun-Xiao Liu,Shu Cheng,Jin-Hua Zhao,Wei-Nan Li,Wei,Bo Peng

DOI: https://doi.org/10.1016/j.optlastec.2012.04.033

IF: 4.939

2012-01-01

Optics & Laser Technology

Abstract:Optical planar and channel waveguides in Yb3+-doped silicate glasses are fabricated by triple-energy helium ion implantation at a total dose of 6.0×1016 ions/cm2. The dark mode spectroscopy of the planar waveguide was measured using a prism coupling arrangement. The near-field mode profiles of the planar and channel waveguide were obtained with an end-face coupling system. The refractive index profile was reconstructed by the intensity calculation method. The results indicate that a refractive index enhanced region as well as an optical barrier has been created after the beam process. After post-implantation treatment at 260 °C for 1 h, the channel waveguides possessed a propagation loss of ∼1.2 dB/cm. The acceptable guiding properties suggest that further waveguide lasers may be realized on the He-implanted Yb3+-doped silicate glass waveguides.
Optical ridge waveguides in Nd3+‐doped fluorophosphate glasses fabricated by carbon ion implantation and femtosecond laser ablation

Chun‐Xiao Liu,Yan Lu,Xiu‐Jun Sun,Hong‐Yu Chen

DOI: https://doi.org/10.1002/mop.33896

IF: 1.311

2023-09-22

Microwave and Optical Technology Letters

Abstract:In this work, the ridge waveguide was formed by the femtosecond laser ablation with a central wavelength of 0.808 μm and a speed of 50 μm/s on the planar Nd3+‐doped fluorophosphate glass waveguide that was fabricated by the C3+ ion implantation with an energy of 6.0 MeV and a fluence of 1.0×1012 C3+s/mm2. The mechanism of the ion‐implanted waveguide was discussed by the Stopping and Range of Ions in Matter 2013. The cross‐section morphology of the ridge waveguide was captured by an optical microscope. Its mode characteristics were analyzed by the end‐face coupling method. The ridge Nd3+‐doped fluorophosphate glass waveguides have potential as fundamental structures for many optoelectronic devices including waveguide amplifiers and lasers.

engineering, electrical & electronic,optics
Planar waveguides in neodymium-doped calcium niobium gallium garnet crystals produced by proton implantation

Chun-Xiao Liu,Meng Chen,Li-Li Fu,Rui-Lin Zheng,Hai-Tao Guo,Zhi-Guang Zhou,Wei-Nan Li,She-Bao Lin,Wei Wei

DOI: https://doi.org/10.1088/1674-1056/25/4/044211

2016-04-01

Chinese Physics B

Abstract:In this work, the fabrication and optical properties of a planar waveguide in a neodymium-doped calcium niobium gallium garnet (Nd:CNGG) crystal are reported. The waveguide is produced by proton (H+) implantation at 480 keV and a fluence of 1.0×1017 ions/cm2. The prism-coupling measurement is performed to obtain the dark mode of the waveguide at a wavelength of 632.8 nm. The reflectivity calculation method (RCM) is used to reconstruct the refractive index profile. The finite-difference beam propagation method (FD-BPM) is employed to calculate the guided mode profile of the waveguide. The stopping and range of ions in matter 2010 (SRIM 2010) code is used to simulate the damage profile induced by the ion implantation. The experimental and theoretical results indicate that the waveguide can confine the light propagation.

physics, multidisciplinary
Monomode Optical Waveguides in Yb3+-Doped Silicate Glasses Produced by Low-Dose Carbon Ion Implantation

Chun-Xiao Liu,Shu Cheng,Wei-Nan Li,Wei,Bo Peng

DOI: https://doi.org/10.1143/jjap.51.052601

IF: 1.5

2012-01-01

Japanese Journal of Applied Physics

Abstract:The planar waveguide has been fabricated in the Yb3+-doped silicate glass by 4.0 MeV C2+ ion implantation at a dose of 2×1014 ions/cm2. The guided modes are measured using a model 2010 prism coupler at 633 nm. The near-field profiles of the planar waveguide are obtained with an end-face coupling system. The refractive index profile of the waveguide is reconstructed by the intensity calculation method, which shows a typical "enhanced well + barrier" distribution. The SRIM'2006 code is carried out to simulate the energy loss during the implantation in order to obtain a better understanding of the waveguide formation. After post-implantation treatment at 260 °C for 1 h, the waveguide possesses a propagation loss of ∼1.42 dB/cm. The acceptable guiding properties suggest that further waveguide lasers may be realized on the C-implanted Yb3+-doped silicate glass waveguides.
Optical Planar Waveguides in Yb 3+ -Doped Phosphate Glasses Produced by He + Ion Implantation

Chun-Xiao Liu,Wei-Nan Li,Wei,Bo Peng

DOI: https://doi.org/10.1088/1674-1056/21/7/074211

2012-01-01

Abstract:Optical planar waveguides in Yb3+-doped phosphate glasses are fabricated by implanting triple-energy helium ions. The guiding modes and the near-field intensity distribution are measured by using the prism-coupling method and the end-face coupling setup with a He—Ne laser at 633 nm The intensity calculation method (ICM) is used to reconstruct the refractive index profile of the waveguide. The absorption and the fluorescence investigations reveal that the glass bulk features are well preserved in the active volumes of the waveguides, suggesting the fabricated structures for possible applications as waveguide lasers.
Modal Characterization of a Planar Waveguide in Bismuth Borate Crystal

Wang Lei,Lu Qing-Ming,Ma Hong-Ji

DOI: https://doi.org/10.1088/0256-307x/26/6/066102

2009-01-01

Abstract:We report on the fabrication and modal property studies of planar waveguide structure in x-cut bismuth borate biaxial crystal formed by He ion implantation with triple energies. The prism coupling method is used to measure the effective refractive indices of this waveguide. We reconstruct the refractive index distribution of this waveguide by the reflectivity calculation method. Our results indicate that a broadened optical barrier is produced by the multiple He ion implantations. The so-called tunneling effect of the non-stationary mode in this type of barrier waveguide is presented by the well-known finite difference beam propagation method.
MgO:LiNbO3 Planar Waveguide Formed by MeV O2+ Implantation and Its Annealing Characteristics

Q. Song,F. Lu,X. Ma,H. Liu,X. Liu,R. Zhang,X. Wang

DOI: https://doi.org/10.1134/s1054660x08070013

IF: 1.2

2008-01-01

Laser Physics

Abstract:A z -cut magnesium-doped LiNbO 3 is implanted by O 2+ at 1.5–4.5 MeV and with doses of 4–12 × 10 14 ions/cm 2 at room temperature. Planar optical waveguides were obtained and characterized by the prismcoupling technique at wavelength of 633 and 1539 nm. Implanted samples were annealed at different temperatures and time durations. After different annealing treatments, mode profiles and optical losses were measured and analyzed.
Oxygen-implanted optical planar waveguides in Er3+/Yb3+-codoped silicate glasses for integrated laser generation

chunxiao liu,jun xu,xiaoli xu,shu wu,wei wei,haitao guo,weinan li,bo peng

DOI: https://doi.org/10.1117/1.OE.53.3.037101

IF: 1.3

2014-01-01

Optical Engineering

Abstract:Er3+/Yb3+-codoped silicate glasses are good candidates for the application of laser actions and signal amplification. Optical planar waveguides in Er3+/Yb3+-codoped silicate glasses are fabricated by 6.0-MeV oxygen-ion implantation with a dose of 6.0 x 10(14) ions/cm(2) at room temperature. The SRIM 2010 code is carried out to simulate the energy losses during the implantation process in order to obtain a better understanding of the waveguide formation. The guiding modes and near-field intensity distributions of the waveguide are characterized by the prism-coupling and end-face coupling methods. The refractive index profile and light propagation mode of the planar waveguide are numerically calculated by the reflectivity calculation method and finite difference beam propagation method. The waveguide has a "well + barrier" refractive index distribution and its optical loss is similar to 1.02 dB/cm. The microluminescence and absorption investigation reveal that fluorescent and transmission properties in the waveguide are well preserved with respect to the bulk, suggesting promising potential for waveguide amplifiers and lasers. (C) 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
Formation of Optical Waveguide and Annealing Behaviour of LiNbO 3 Implanted by 3.0-Mev Nickel Ions

Tt Zhang,F Lu,Sl Li,Xl Wang,Dy Shen,Hj Ma

DOI: https://doi.org/10.1088/0256-307x/21/8/039

2004-01-01

Abstract:The optically polished LiNbO3 crystal was implanted with 3.0 MeV nickel ions to a dose of 8 x 1014 ions/cm(2). The implanted sample was orderly annealed at different temperatures for different times in air ambient. The waveguide properties before and after annealing were investigated. Dark modes were observed by the prism coupling technique. The reconstructed refractive index profiles were obtained with the reflectivity calculation method. With the fibre probe technique, the attenuation of the Ni-implanted barrier-confined waveguide was measured for the first time. The waveguide loss was reduced from 1.65dB/cm to 1.19dB/cm when annealing was at 300degreesC for 30 min. With the annealing temperature increasing to 370degreesC, only fewer broad dark modes were found. It is indicated that the lattice damage by implantation began to resume under this annealing condition. After annealing at 380degreesC for 60 min, all the dark modes disappeared.
Optical Properties of Yb3+-doped Silicate Glasses Waveguides Formed by Low-Dose Oxygen Ion Implantation and Effects of Annealing

Chun-Xiao Liu,Shu Cheng,Hai-Tao Guo,Wei-Nan Li,Wei,Bo Peng

DOI: https://doi.org/10.1016/j.ijleo.2012.05.019

IF: 3.1

2013-01-01

Optik

Abstract:The planar waveguide, to our knowledge, has been firstly fabricated in the Yb3+-doped silicate glass by 6.0MeV O3+ ion implantation at a dose of 6×1014ions/cm2. The guiding properties are characterized by the prism-coupling and end-face coupling methods with a He–Ne beam. The dark-mode spectra and near-field intensity distribution are measured before and after annealing at 250°C for 1h in air. The results indicate that the thermal treatment can enhance the propagation properties with preserving the effective refractive indices well. The refractive index profile of the planar waveguide is reconstructed by the reflectivity calculation method, which shows a typical “enhanced well+optical barrier” distribution. The SRIM’2006 code is carried out to simulate the energy loss during the implantation in order to obtain a better understanding of the waveguide formation.
One-dimensional and two-dimensional Er 3+ -doped germanate glass waveguides by combination of He + ion implantation and precise diamond blade dicing

Chun-Xiao Liu,Yan Lu,Wei-Jie Ding,Jia-Li You,Liao-Lin Zhang,Li-Li Fu,Qing-Yang Yue,She-Bao Lin,Yan-Jun Zhou

DOI: https://doi.org/10.1016/j.vacuum.2022.111743

IF: 4

2022-12-17

Vacuum

Abstract:Compact and miniaturized Er 3+ -doped waveguide structure is an important research direction in integrated optics. In this work, the Er 3+ -doped germanate glass was bombarded by a 400-keV He + ion beam with a fluence of 6.0 × 10 16 ions/cm 2 for the formation of the one-dimensional waveguide in a vacuum. Subsequently, the precise diamond blade with a rotating velocity of 20,000 rpm and a cutting speed of 0.1 mm/s was applied to dice the surface of the one-dimensional waveguide for the fabrication of the two-dimensional structure. The formation mechanism and the refractive index profile of the one-dimensional waveguide were studied by the SRIM 2013 and the RCM, respectively. The electromagnetic field profiles for the fundamental modes of both one-dimensional and two-dimensional waveguides were measured by the end-face coupling method. It presents some useful information in the field of fabrication and characterization of optical waveguides for active photonic applications.

materials science, multidisciplinary,physics, applied
Preparation and characteristics of the O3+-ion-implanted and femtosecond laser-ablated waveguide in the high-gain Nd3+-doped laser glass

Chun-Xiao Liu,Zi-Hao Wang,Wang Sun,Jie Zhao,Xiao-Yu Bao

DOI: https://doi.org/10.1007/s10854-024-12686-2

2024-05-08

Journal of Materials Science Materials in Electronics

Abstract:In the work, the planar and ridge waveguides are fabricated by the combination of ion implantation and femtosecond laser ablation in the high-gain Nd 3+ -doped laser glass. The species, energy, and dose of ion implantation are O 3+ ion, 6.0 × 10 6 eV, and 5.0 × 10 14 ions/cm 2 , respectively. The pulse energy and the scanning velocity are 3 μJ and 50 μm/s for the FS laser ablation. The m-line curve and the refractive index distribution of the planar waveguide are got via a prism coupler and a reflection calculation method, respectively. The refractive index in waveguide core is increased by 2.3 × 10 –3 through the O 3+ ion irradiation. The microscope images and near-field intensity distributions for both planar and ridge waveguides are measured by a Nikon microscope and an end-face coupling arrangement, respectively. The cross-sectional dimension of the ridge waveguide is 4.2 μm × 10 μm. It has the potential to explore new dimensions in the field of the active waveguides.

engineering, electrical & electronic,materials science, multidisciplinary,physics, condensed matter, applied
Optical planar and ridge waveguides in terbium scandium aluminum garnet crystal fabricated by ion implantation and precise diamond blade dicing

Jie Zhang,Jing-Yi Chen,Yan Lu,Yu-Song Wang,Liao-Lin Zhang,Qing-Yang Yue,Rui-Lin Zheng,Chun-Xiao Liu

DOI: https://doi.org/10.1016/j.vacuum.2021.110493

IF: 4

2021-11-01

Vacuum

Abstract:Terbium scandium aluminum garnet crystal is a promising material which has excellent characteristics for magneto-optical devices. We report on the fabrication of optical planar and ridge waveguides in the terbium scandium aluminum garnet by using combination of helium ion implantation and precise diamond blade dicing. The conditions for the ion implantation are an energy of 400 keV and a fluence of 6 × 1016 ions/cm2. The rotating velocity and cutting speed of the diamond blade were set to be 20,000 rpm and 0.1 mm/s, respectively. The implantation depth and distributions of energy loss were calculated by the stopping and range of ions in matter 2013. The refractive index distribution and the dark-mode spectrum for the implanted planar waveguide were obtained by the reflectivity calculation method and the prism coupling system, respectively. The near-field intensity profiles of both the planar and ridge waveguides were measured by the end-face coupling technique. The optical guiding properties of the terbium scandium aluminum garnet waveguides suggest that they can serve as candidates for optical waveguide isolators.

materials science, multidisciplinary,physics, applied
Optical and magnetic properties in well and barrier ZnS waveguides formed by MeV Ni and Cu ion implantation

Tao Liu,Hailian Li,Minghui Xu,Yicun Yao,Jinjun Gu,Sumei Wang,Yong Liu,Weijin Kong,Zhixian Wei,Tiejun Wang,Mei Qiao

DOI: https://doi.org/10.1016/j.optmat.2023.113991

IF: 3.754

2023-06-08

Optical Materials

Abstract:Well and barrier waveguides were fabricated in zinc sulfide (ZnS) single crystals via nickel (Ni) and copper (Cu) ion implantation. Elastic collisions between the implanted ions and target nuclei were reconstructed using SRIM software. The prism coupling and end-face coupling methods were applied to capture the dark-mode spectrum and near-field intensity distributions, respectively, at 633 nm. The absorption spectra from the UV to visible band of the ZnS crystals before and after Ni and Cu ion implantation were collected on a spectrophotometer . Magnetic properties at room temperature were evaluated under a magnetic field of 3T.

materials science, multidisciplinary,optics
Femtosecond Laser-Written Waveguides in a Bismuth Germanate Single Crystal

Qian Bin,Liao Yang,Dong Guo-Ping,Luo Fang-Fang,Su Liang-Bi,Sun Sheng-Zhi,Qiu Jian-Rong

DOI: https://doi.org/10.1088/0256-307x/26/7/070601

2009-01-01

Abstract:We demonstrate the fabrication of symmetric waveguides in a bismuth germanate (BGO) single crystal using a double line approach by an 800nm femtosecond laser. The optical attenuation of the single mode waveguide is measured to be 4.2 dB/cm at 633 nm. The influence of pulse energy and focal depth on the end facet of the irradiated region is also studied. This technique is promising to fabricate buried BGO waveguide arrays used in positron emission tomography systems.

Formation of optical waveguides in KNbO3 by MeV boron ion implantation

Planar Optical Waveguides in KNbO 3 Formed by MeV B and He Ion Implantation

Synthesis of optical-quality single-crystal β-BaB2O 4 microwires and nanowires

Formation of optical planar waveguides on fused quartz by MeV ion implantation

Near-infrared Carbon-Implanted Waveguides in Tb3+-doped Aluminum Borosilicate Glasses

MeV Ti ion-implantation-induced damages in LiNbO3

Monomode Optical Planar and Channel Waveguides in Yb3+-doped Silicate Glasses Formed by Helium Ion Implantation

Optical ridge waveguides in Nd3+‐doped fluorophosphate glasses fabricated by carbon ion implantation and femtosecond laser ablation

Planar waveguides in neodymium-doped calcium niobium gallium garnet crystals produced by proton implantation

Monomode Optical Waveguides in Yb3+-Doped Silicate Glasses Produced by Low-Dose Carbon Ion Implantation

Optical Planar Waveguides in Yb 3+ -Doped Phosphate Glasses Produced by He + Ion Implantation

Modal Characterization of a Planar Waveguide in Bismuth Borate Crystal

MgO:LiNbO3 Planar Waveguide Formed by MeV O2+ Implantation and Its Annealing Characteristics

Oxygen-implanted optical planar waveguides in Er3+/Yb3+-codoped silicate glasses for integrated laser generation

Formation of Optical Waveguide and Annealing Behaviour of LiNbO 3 Implanted by 3.0-Mev Nickel Ions

Optical Properties of Yb3+-doped Silicate Glasses Waveguides Formed by Low-Dose Oxygen Ion Implantation and Effects of Annealing

One-dimensional and two-dimensional Er 3+ -doped germanate glass waveguides by combination of He + ion implantation and precise diamond blade dicing

Preparation and characteristics of the O3+-ion-implanted and femtosecond laser-ablated waveguide in the high-gain Nd3+-doped laser glass

Optical planar and ridge waveguides in terbium scandium aluminum garnet crystal fabricated by ion implantation and precise diamond blade dicing

Optical and magnetic properties in well and barrier ZnS waveguides formed by MeV Ni and Cu ion implantation

Femtosecond Laser-Written Waveguides in a Bismuth Germanate Single Crystal