MgO:LiNbO3 Planar Waveguide Formed by MeV O2+ Implantation and Its Annealing Characteristics

Q. Song,F. Lu,X. Ma,H. Liu,X. Liu,R. Zhang,X. Wang
DOI: https://doi.org/10.1134/s1054660x08070013
IF: 1.2
2008-01-01
Laser Physics
Abstract:A z -cut magnesium-doped LiNbO 3 is implanted by O 2+ at 1.5–4.5 MeV and with doses of 4–12 × 10 14 ions/cm 2 at room temperature. Planar optical waveguides were obtained and characterized by the prismcoupling technique at wavelength of 633 and 1539 nm. Implanted samples were annealed at different temperatures and time durations. After different annealing treatments, mode profiles and optical losses were measured and analyzed.
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