Fabrication and Annealing Optimization of Oxygen-Implanted Yb3+-doped Phosphate Glass Planar Waveguides

Chun-Xiao Liu,Jun Xu,Wei-Nan Li,Xiao-Li Xu,Hai-Tao Guo,Wei,Gen-Gen Wu,Yue Hu,Bo Peng
DOI: https://doi.org/10.1016/j.optlastec.2014.03.014
2014-01-01
Abstract:Optical planar waveguides in Yb3+-doped phosphate glasses are fabricated by (5.0+6.0)MeV O3+ ion implantation at fluences of (4.0+8.0)×1014 ions/cm2. The annealing treatment is carried out to optimize waveguide performances. The prism-coupling and end-face coupling methods are used to measure the dark-mode spectra and near-field intensity distributions before and after annealing at 350°C for 60min, respectively. The refractive index profile of the planar waveguide is obtained based on the reflectivity calculation method. The micro-Raman spectrum of the waveguide is in agreement with that of the bulk, exhibiting possible applications for integrated active photonic devices.
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