Abstract:β-Ga2O3 is an ultra-wide bandgap semiconductor (Eg~4.8 eV) of interest for many applications, including optoelectronics. Undoped Ga2O3 emits light in the UV range that can be tuned to the visible region of the spectrum by rare earth dopants. In this work, we investigate the crystal lattice recovery of (2¯01)-oriented β-Ga2O3 crystals implanted with Yb ions to the fluence of 1 ×1014 at/cm2. Post-implantation annealing at a range of temperature and different atmospheres was used to investigate the β-Ga2O3 crystal structure recovery and optical activation of Yb ions. Ion implantation is a renowned technique used for material doping, but in spite of its many advantages such as the controlled introduction of dopants in concentrations exceeding the solubility limits, it also causes damage to the crystal lattice, which strongly influences the optical response from the material. In this work, post-implantation defects in β-Ga2O3:Yb crystals, their transformation, and the recovery of the crystal lattice after thermal treatment have been investigated by channeling Rutherford backscattering spectrometry (RBS/c) supported by McChasy simulations, and the optical response was tested. It has been shown that post-implantation annealing at temperatures of 700-900 °C results in partial crystal lattice recovery, but it is accompanied by the out-diffusion of Yb ions toward the surface if the annealing temperature and time exceed 800 °C and 10 min, respectively. High-temperature implantation at 500-900 °C strongly limits post-implantation damage to the crystal lattice, but it does not cause the intense luminescence of Yb ions. This suggests that the recovery of the crystal lattice is not a sufficient condition for strong rare-earth photoluminescence at room temperature and that oxygen annealing is beneficial for intense infrared luminescence compared to other tested environments.

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Fabrication and Annealing Optimization of Oxygen-Implanted Yb3+-doped Phosphate Glass Planar Waveguides

Monomode Optical Waveguides in Yb3+-Doped Silicate Glasses Produced by Low-Dose Carbon Ion Implantation

Monomode Optical Planar and Channel Waveguides in Yb3+-doped Silicate Glasses Formed by Helium Ion Implantation

Oxygen-implanted optical planar waveguides in Er3+/Yb3+-codoped silicate glasses for integrated laser generation

Optical Planar Waveguides in Yb 3+ -Doped Phosphate Glasses Produced by He + Ion Implantation

Proton-Implanted Optical Planar Waveguides in Yb3+-Doped Silicate Glasses

Low-dose carbon-implanted planar waveguides in Er 3+ /Yb 3+ co-doped silicate glasses

Near-infrared Carbon-Implanted Waveguides in Tb3+-doped Aluminum Borosilicate Glasses

Microstructure and Luminescence of Yb3+-doped Fluorosilicate Glass Ceramics

Crystal Lattice Recovery and Optical Activation of Yb Implanted into β-Ga2O3

Preparation and characteristics of the O3+-ion-implanted and femtosecond laser-ablated waveguide in the high-gain Nd3+-doped laser glass

Research on optical properties of Yb3+/Er3+ co-doped oxy-fluoride glass

Optical properties of the O3+-ion implanted and femtosecond-laser ablated ridge waveguide in the Er3+-doped germanate glass

Helium-implanted optical planar waveguides in Nd3+-doped phosphate glass

Sensitized Yb3+ Luminescence of Eu3+/Yb3+‐Codoped Fluorosilicate Glass Ceramics

MgO:LiNbO3 Planar Waveguide Formed by MeV O2+ Implantation and Its Annealing Characteristics

Structure-Dependent Spectroscopic Properties of Yb3+-Doped Phosphosilicate Glasses Modified by Sio2

Planar waveguides in neodymium-doped calcium niobium gallium garnet crystals produced by proton implantation

Enhanced radiation resistance of Er3+/Yb3+ co-doped high-phosphorus silica glasses and fibers via phase-interface engineering

Helium-Implanted Optical Planar Waveguides in Nd <sup>3+</sup> -Doped Phosphate Glass