Optical Waveguide Properties of LiNbO3 Thin Films on Silicon Substrates

Xinchang Wang,Zhizhen Ye,Shiling Li,Liangliang Cao,Binghui Zhao

DOI: https://doi.org/10.3969/j.issn.1672-7126.2005.04.002

2005-01-01

Abstract:Highly c-axis oriented LiNbO3 thin films have been grown on Si substrates with the amorphous SiO2 cladding layer by pulsed laser deposition. The effects of substrates temperature on the growth of the film texture and crystallinity have been systematically investigated. Highly c-axis oriented LiNbO3 films can be grown at a substrate temperature of 600°C. The SEM and TEM measurements show that the compact films have fairly smooth surfaces and uniformly grains size. The film has columnar structure, vertical to the substrate. Good optical waveguide properties of LiNbO3 films are observed by using of the prism coupled method. The optical propagation loss of LiNbO3 films under 600°C is 1.14 dB/cm.