X-Ray Emission Measurement from Organic and Insulating Materials with Low Energy Ga Ion Beams

R. C. Che,M. Song,J. C. Rao,M. Takeguchi,K. Furuya
DOI: https://doi.org/10.1380/ejssnt.2006.365
2006-01-01
e-Journal of Surface Science and Nanotechnology
Abstract:We observed a phenomenon of X-ray emission from various types of organic and insulating materials under irradiation of a low energy (30 kV) gallium ion beam. Energy dispersive X-ray spectrometer combined with a focused ion beam instrument could detect light elements with low K-shell electron excitation energy such as carbon, oxygen, fluorine, sodium and silicon. Effect of the current intensity of gallium ion beam on the normalized X-ray yield was investigated. It was found that a strong irradiation beam current could effectively enhance the normalized X-ray yield.
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