Abstract:Doped hydrogenated microcrystalline silicon thin films play a critical role in multi-junction thin-film silicon solar cells, because their crystallinity has a large influence on the properties of intrinsic microcrystalline silicon absorber layers grown on them. The doping efficiency of the doped layers depends strongly on their crystallinity and hence a high-crystallinity doped layer is desired. In this study, highly crystalline doped microcrystalline silicon films are formed on 300mm × 400mm glass substrates using a conventional parallel-plate PECVD reactor operated at 13.56MHz. Raman spectroscopy is used to analyse the crystallinity of the films. The conductivity of the films is measured using the co-planar electrode method. The effects of the deposition parameters on the Raman crystallinity and conductivity of the doped films are investigated. The RF power is found to play a key role for achieving a high crystallinity in the doped layers, whereby a high crystallinity can only be obtained within a narrow RF power range. The influence of the RF power on the lateral thickness uniformity of the deposited films is also examined. It is found that the RF power has a strong influence on the lateral uniformity of the deposited films, with intermediate power giving the best thickness uniformity.

STUDY OF RELATIONSHIP BETWEEN MICROCRYSTALLINE SILICON THIN FILM AND SOLAR CELLS

Fabrication of Microcrystalline Silicon Materials and Microcrystalline Silicon Solar Cells and Study on Their Properties

STUDY ON MICROCRYSTALLINE SILICON THIN FILM SOLAR CELLS ON FLEXIBLE SUBSTRATE

Fabrication of 1nm/s High Deposition Microcrystalline Silicon and Its Application in Solar Cells

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Investigation of Improved Conversion Efficiency of Microcrystalline Silicon Thin Film Solar Cells

Study on Quantum Efficiencies of Microcrystalline Silicon Solar Cells on Flexible Substrates

Relation of light stability and microstructure of microcrystalline silicon thin film

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Single-chamber Deposition of Intrinsic Microcrystalline Silicon Thin Film and Its Application in Solar Cells

A PRELIMINARY STUDY ON MICROCRYSTALLINE SILICON MATERIALS AND SOLAR CELLS FABRICATED BY VHF-PECVD

Fabrication and research of SiO_x:H thin film as an interlayer in amorphous/microcrystalline silicon solar cells

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Microcrystalline Silicon Materials and Solar Cells with High Deposition Rate

Study of Incubation Layers in Microcrystalline Silicon Solar Cells

Investigation on Significant Efficiency Enhancement of Thin Crystalline Silicon Solar Cells

Investigation of Amorphous Silicon/Microcrystalline Silicon Tandem Solar Cells on Flexible Substrates

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High Conductivity Intrinsic Nanocrystalline Silicon Film and As Buffer Layer in Thin Film Solar Cells