Abstract:p-Type hydrogenated silicon carbide (p-SiC:H) films were prepared using plasma-enhanced chemical vapor deposition by systematically incorporating carbon into nanocrystalline silicon networks. The carbon content of the films was varied by adjusting the methane/silane (CH4/SiH4; R-c) ratio. The chemical bonding, micro structural, and electro-optical properties of the films were investigated in detail. With increasing R-c,R-, the silicon carbon bond density in the films increased gradually and the overall microstructure became amorphous. Through sophisticated control of the carbon content of the films during high hydrogen dilution deposition, p-type hydrogenated nanocrystalline SiC:H (p-nc-SiC:H) films with nanometer-scale Si crystallites embedded in an amorphous SiC:H matrix were obtained. The p-nc-SiC:H films had wide bandgaps larger than 2 eV and reduced parasitic light absorption at wavelengths below 550 nm. When using wide-bandgap p-nc-SiC:H films with superior electro-optical properties as window layers in n-i-p flexible and p-i-n semi-transparent nc-Si:H solar cells, in place of conventional p-nc-Si:H layers with narrow bandgaps, enhanced cell performance was achieved because of both high open circuit voltage (V-oc) and high quantum efficiency values at short wavelengths of 350-550 nm. The conversion efficiencies of the flexible nc-Si:H solar cells increased from 6.37% (V-oc = 0.41 V, J(sc) = 22.81 mA/cm(2), and FF = 68.10%, where Jsc is the short-circuit current density and FF is the fill factor, respectively) to 7.89% (Voc = 0.51 V, J(sc) = 24.04 mA/cm(2), and FF = 64.37%). A further increase in the conversion efficiency to 9.18% was obtained by inserting a very thin, highly-doped p-nc-SiC:H buffer layer between a low-doped p-nc-SiC:H window layer and an indium tin oxide front contact. A significant increase in the conversion efficiency from 3.66% (V-oc = 0.42 V, J(sc) = 14.83 mA/cm(2), and FF = 58.69%) to 4.33% (V-oc = 0.45 V, J(sc) = 17.74 mA/cm(2), and FF = 54.18%) was achieved with the semi-transparent nc-Si:H solar cell, with an average optical transmittance of 17.29% in the visible wavelength region of 500-800 nm.

Microcrystalline silicon carbide window layers in thin film silicon solar cells

Microcrystalline Silicon‐carbon Alloys As Anti‐reflection Window Layers in High Efficiency Thin Film Silicon Solar Cells

Microcrystalline Silicon Thin Film Solar Cells with Microcrystalline Silicon Carbide Window Layers and Silicon Absorber Layers Both Prepared by Hot‐Wire CVD

Development of microcrystalline silicon carbide window layers by hot-wire CVD and their applications in microcrystalline silicon thin film solar cells

Highly Conductive p-Type Silicon Carbon Alloys Deposited by Hot-Wire Chemical Vapor Deposition

Microcrystalline silicon carbide thin films grown by HWCVD at different filament temperatures and their application in n-i-p microcrystalline silicon solar cells

Silicon Rich Carbide As A Conductive Substrate For Si Qd Solar Cells

Material Properties of Nanocrystalline Silicon Carbide for Transparent Passivating Contact Solar Cells

Wide-bandgap Nanocrystalline Silicon-Carbon Alloys for Photovoltaic Applications

Crystalline Silicon Heterojunction Solar Cells with Metal Oxide Window Layers

Crystalline Silicon Heterojunction Solar Cell with 81.6% Fill Factor, Deposited by Physical Vapour Deposition Methods Only

Application of Silicon Nanocrystals in Solar Cells

Nano-crystalline Thin Films Fabricated by Si-Al Co-Sputtering and Metal Induced Crystallization for Photovoltaic Applications

Control of crystalline volume fraction of μC-Si thin film using 40.68 MHz PECVD system for solar cell application

Key Issues for High-Efficiency Silicon Thin Film Solar Cells Prepared by RF-PECVD under High-Pressure-depletion Conditions

Microcrystalline Silicon Materials and Solar Cells with High Deposition Rate

Microcrystalline SiGe Prepared by VHF-PECVD for Thin Film Solar Cells

Single-chamber Deposition of Intrinsic Microcrystalline Silicon Thin Film and Its Application in Solar Cells

STUDY ON MICROCRYSTALLINE SILICON THIN FILM SOLAR CELLS ON FLEXIBLE SUBSTRATE

Towards the implementation of a p-nc-SiOx:H/p-SiC:H double window layer for high efficiency, roll-to-roll processed flexible thin film silicon solar modules

Fabrication of High-Quality Boron-Doped Microcrystalline Silicon Thin Films on Several Types of Substrates