Abstract:High efficiency thin-film silicon (Si) solar cells were prepared on flexible substrates by the plasma-enhanced chemical vapor deposition method. To improve their performance, the microstructural, electrical, and optical properties of the core component layers including the metal rear reflectors, p- and n-type doped layers, and intrinsic absorber layers were controlled sophistically. To enable the use of flexible substrates with low heat resistance as well as to enhance light-scattering properties, nanotextured rear reflectors with a Ag/Al:Si bilayer structure were developed by dc magnetron sputtering at a low substrate temperature of below 150 degrees C. Highly crystalline n-doped seed layers (which effectively eliminate a defect-dense amorphous region formed in the initial growth stage of intrinsic nanocrystalline silicon (nc-Si:H) absorber layers) and p-type wide-bandgap nanocrystalline silicon carbide (nc-SiC:H) window layers (which reduce the parasitic absorption loss in the short wavelength region and increase the open circuit voltage (Voc)) were successfully applied to enhance the performance characteristics of the solar cells. Through the combination of the developed core component layers, high conversion efficiencies of 8.84% (V-oc = 0.53 V, J(sc) = 25.28 mA/cm(2), and fill factor (FF) = 0.66, where J(sc) is the short circuit current) and 7.48% (V-oc = 0.50 V, J(sc) = 21.07 mA/cm(2), and FF = 0.71) were obtained for nc-Si:H solar cells fabricated on stainless steel (SUS) and polyimide substrates, respectively, at a low substrate temperature of below 150 degrees C. Flexible a-Si:H/nc-Si:H double-junction solar cells fabricated on SUS substrates showed a high conversion efficiency of 11.46% (V-oc = 1.38 V, J(sc) = 11.53 mA/cm(2), and FF = 032) when the nc-Si:H solar cells developed in this study were applied as a bottom cell.

Investigation of Improved Conversion Efficiency of Microcrystalline Silicon Thin Film Solar Cells

Influence of the Total Gas Flow Rate on High Rate Growth Microcrystalline Silicon Films and Solar Cells

STUDY OF RELATIONSHIP BETWEEN MICROCRYSTALLINE SILICON THIN FILM AND SOLAR CELLS

Investigation on Significant Efficiency Enhancement of Thin Crystalline Silicon Solar Cells

Fabrication of 1nm/s High Deposition Microcrystalline Silicon and Its Application in Solar Cells

Microcrystalline Silicon Materials and Solar Cells with High Deposition Rate

Study on Quantum Efficiencies of Microcrystalline Silicon Solar Cells on Flexible Substrates

Improvement of conversion efficiency of multicrystalline silicon solar cells by incorporating reactive ion etching texturing

Realization of Improved Efficiency on Nanostructured Multicrystalline Silicon Solar Cells for Mass Production

Fabrication of Microcrystalline Silicon Materials and Microcrystalline Silicon Solar Cells and Study on Their Properties

Conversion Efficiency Enhancement of Multi-Crystalline Si Solar Cells by Using A Micro-Structured Junction

Microcrystalline Silicon‐carbon Alloys As Anti‐reflection Window Layers in High Efficiency Thin Film Silicon Solar Cells

STUDY ON MICROCRYSTALLINE SILICON THIN FILM SOLAR CELLS ON FLEXIBLE SUBSTRATE

Performance Optimization of P-I-n Type Microcrystalline Silicon Thin Films Solar Cells Deposited in Single Chamber

Performance Enhancement of Thin-Film Silicon Solar Cells by Development of Core Component Layers

Improved Crystallization of Perovskite Films by Optimized Solvent Annealing for High Efficiency Solar Cell.

Single-chamber Deposition of Intrinsic Microcrystalline Silicon Thin Film and Its Application in Solar Cells

Efficiency Improvement in Si Thin Film Solar Cells by Employing Composite Nanocone-Shaped Grating Structure

Improved performance on multi-crystalline silicon solar cells by optimizing aluminum back surface field process

High Efficiency Amorphous/microcrystalline Silicon Tandem Solar Cells Deposited in a Single Chamber System

Theoretical simulation and experimental perspective of refractive index-controlled silicon nanofilms for solar cell efficiency improvement