Abstract:High efficiency thin-film silicon (Si) solar cells were prepared on flexible substrates by the plasma-enhanced chemical vapor deposition method. To improve their performance, the microstructural, electrical, and optical properties of the core component layers including the metal rear reflectors, p- and n-type doped layers, and intrinsic absorber layers were controlled sophistically. To enable the use of flexible substrates with low heat resistance as well as to enhance light-scattering properties, nanotextured rear reflectors with a Ag/Al:Si bilayer structure were developed by dc magnetron sputtering at a low substrate temperature of below 150 degrees C. Highly crystalline n-doped seed layers (which effectively eliminate a defect-dense amorphous region formed in the initial growth stage of intrinsic nanocrystalline silicon (nc-Si:H) absorber layers) and p-type wide-bandgap nanocrystalline silicon carbide (nc-SiC:H) window layers (which reduce the parasitic absorption loss in the short wavelength region and increase the open circuit voltage (Voc)) were successfully applied to enhance the performance characteristics of the solar cells. Through the combination of the developed core component layers, high conversion efficiencies of 8.84% (V-oc = 0.53 V, J(sc) = 25.28 mA/cm(2), and fill factor (FF) = 0.66, where J(sc) is the short circuit current) and 7.48% (V-oc = 0.50 V, J(sc) = 21.07 mA/cm(2), and FF = 0.71) were obtained for nc-Si:H solar cells fabricated on stainless steel (SUS) and polyimide substrates, respectively, at a low substrate temperature of below 150 degrees C. Flexible a-Si:H/nc-Si:H double-junction solar cells fabricated on SUS substrates showed a high conversion efficiency of 11.46% (V-oc = 1.38 V, J(sc) = 11.53 mA/cm(2), and FF = 032) when the nc-Si:H solar cells developed in this study were applied as a bottom cell.

Performance Optimization of P-I-n Type Microcrystalline Silicon Thin Films Solar Cells Deposited in Single Chamber

A Facile Interface Engineering Method to Improve the Performance of FTO/ZnO/CsPbI 3− X Br X ( X < 1)/C Solar Cells

Single-chamber Deposition of Intrinsic Microcrystalline Silicon Thin Film and Its Application in Solar Cells

A Method to Slow Down the Etching of Hydrogen Plasma Pretreatment and Improve Passivation in Silicon Heterojunction Solar Cells

Silicon Nanocrystal Conjugated Polymer Hybrid Solar Cells with Improved Performance

Research on the Boron Contamination at the P/i Interface of Microcrystalline Silicon Solar Cells Deposited in a Single PECVD Chamber

Mechanism Insight into the Effect of I/P Buffer Layer on the Performance of NIP-type Hydrogenated Microcrystalline Silicon Solar Cells

Influence of Low Rate P/I Interface Layer on the Performance of High Growth Rate Microcrystalline Silicon Solar Cells

STUDY ON MICROCRYSTALLINE SILICON THIN FILM SOLAR CELLS ON FLEXIBLE SUBSTRATE

Improved performance of GaAs-based micro-solar cell with novel polyimide/SiO 2 /TiAu/SiO 2 structure

Boron Doped Hydrogenated Nanocrystalline Silicon Thin Films Prepared by Layer-by-layer Technique and Its Application in N-I-p Flexible Amorphous Silicon Thin Film Solar Cells

Improved Interface Microstructure Between Crystalline Silicon and Nanocrystalline Silicon Oxide Window Layer of Silicon Heterojunction Solar Cells

Impact of Surface Treatments on the Passivation Effect for N-Type Crystalline Silicon in Heterojunction Solar Cells

Improving the performance of high-efficiency silicon heterojunction solar cells through low-temperature deposition of an i-a-Si:H anti-epitaxial buffer layer

Performance Enhancement of Thin-Film Silicon Solar Cells by Development of Core Component Layers

High-Performance Ultrathin Organic-Inorganic Hybrid Silicon Solar Cells via Solution-Processed Interface Modification.

Key Issues for High-Efficiency Silicon Thin Film Solar Cells Prepared by RF-PECVD under High-Pressure-depletion Conditions

Role of Hydrogen Plasma Pretreatment in Improving Passivation of the Silicon Surface for Solar Cells Applications

Improvement of amorphous silicon n-i-p solar cells by incorporating double-layer hydrogenated nanocrystalline silicon structure

Reduced adverse effects on Si thin film solar cells caused by growth chamber air exposure

Study on P-a-Si:H properties of N-type heterogeneous junction solar cells manufactured by large-area parallel plate PECVD machine