Structural and Optical Properties of AlxGa1−xN (0.33 ≤ X ≤ 0.79) Layers on High-Temperature AlN Interlayer Grown by Metal Organic Chemical Vapor Deposition
Qingjun Xu,Bin Liu,Shiying Zhang,Tao,Jiangping Dai,Guotang He,Zili Xie,Xiangqian Xiu,Dunjun Chen,Peng Chen,Ping Han,Rong Zhang
DOI: https://doi.org/10.1016/j.spmi.2016.11.029
IF: 3.22
2017-01-01
Superlattices and Microstructures
Abstract:High-Al-content AlxGa1-xN films with x varying from 0.33 to 0.79 were grown on GaN templates with the high temperature AIN (HT-AIN) interlayer by metal organic chemical vapor deposition (MOCVD). The best crystalline quality, among these AlxGa1-xN alloys, can be obtained for an AIN mole fraction x = 0.55, where the full-width at half-maximum of the Al0.55Ga0.45N (0002) diffraction peak was measured to be 259 arcsec by high resolution X-ray diffraction (HRXRD). The screw threading dislocation (TDs) density was 2 x 10(8) cm(-2) evaluated by transmission electron microscope (TEM), which agreed with the calculations from Williamson-Hall plots. Moreover, cross-sectional TEM indicated that the HT-AIN interlayer could sufficiently reduce the threading dislocations (TDs) through generation of V trenches in the HT-AIN interlayer, since the TDs propagated along the V trenches, then bent into basal planes and annihilated with other dislocations. The study of optical properties indicated that obvious S-shape of temperature dependence on emission energy was observed for Al0.55Ga0.45N layers, which was attributed to exciton localization with energy (E-IOC) similar to 14.95 meV at 10 K resulting from potential fluctuation and band tail states. The time-resolved photoluminescence (TRPL) curves showed a bi-exponential decay at low temperature. The fast decay time implied the presence of the localized excitons enhancing radiative recombination, while the quite slow one was due to the dominance of trapping mechanisms originating from cation vacancy complexes and the V-III-related complexes. (C) 2016 Elsevier Ltd. All rights reserved.