Analyses on High-Temperature Electrical Properties of 4H-Sic N-Mosfet

JP Xu,CX Li,HP Wu
DOI: https://doi.org/10.7498/aps.54.2918
IF: 0.906
2005-01-01
Acta Physica Sinica
Abstract:High-temperature electrical properties of 4H-SiC n-MOSFET are simulated and analyzed by considering changes of mobility and threshold voltage with temperature. The simulated results are in good agreement with experimental data. Further more, influences of main structural and technological parameters on high-temperature electrical properties of devices are discussed for obtaining optimum values of these parameters.
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