High Temperature Characterization Of 4h-Sic Normally-On Vertical Jfets With Buried Gate And Buried Field Rings

A. Mihaila,F. Udrea,S. J. Rashid,P. Godignion,P. Brosselard,D. Tournier,J. Millan,G. Amaratunga
DOI: https://doi.org/10.1109/ISPSD.2006.1666096
2006-01-01
Abstract:The continuous progress made over the past years in terms of material quality and key technological issues combined with a better understanding of the devices' physics have placed Silicon Carbide (SiC) devices in a position from where they can challenge the present day Silicon (Si) solutions in high power/high temperature applications. Since they avoid gate oxide-related problems such as channel mobility and high temperature long term reliability typical of SiC MOSFETs, SiC JFETs are attractive candidates for applications requiring high power/high temperature operation. This paper reports for the first time experimental results of a 4H-SiC normally on JFET using buried p+ gates and buried field rings (BFRs) in the termination region. The device uses a double layer epitaxial process with a novel, more highly doped buffer layer. The paper also investigates the high temperature operation (up to 300 degrees C) of the device.
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