Thermal Conductivity of AlN Ceramics Sintered with CaF2 and YF3

L Qiao,HP Zhou,RL Fu
DOI: https://doi.org/10.1016/s0272-8842(03)00033-6
IF: 5.532
2003-01-01
Ceramics International
Abstract:Dense AlN ceramics with a thermal conductivity of 180W/m(.)K were obtained at the sintering temperature of 1750 degreesC using CaF2 and YF3 as additives. At temperatures below 1650 degreesC, the shrinkage of AlN ceramics is promoted by liquid (Ca,Y)F-2 and Ca12Al14O32F2. Liquid CaYAlO4 mainly improves the densification of the sample when the sintering temperature increases to 1750 degreesC. The formation of liquid (Ca,Y)F-2 at a relatively low temperature results in homogeneous YF3 distribution around the AlN particles, which benefits the removal of oxygen impurity in the AlN lattice, and thus a higher thermal conductivity. (C) 2003 Elsevier Ltd and Techna S.r.l. All rights reserved.
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