Few Electron Limit of n-type Metal Oxide Semiconductor Single Electron Transistors
Enrico Prati,Marco De Michielis,Matteo Belli,Simone Cocco,Marco Fanciulli,Dharmraj Kotekar-Patil,Matthias Ruoff,Dieter P. Kern,David A. Wharam,Arjan Verduijn,Giuseppe Tettamanzi,Sven Rogge,Benoit Roche,Romain Wacquez,Xavier Jehl,Maud Vinet,Marc Sanquer
DOI: https://doi.org/10.1088/0957-4484/23/21/215204
2012-03-21
Abstract:We report electronic transport on n-type silicon Single Electron Transistors (SETs) fabricated in Complementary Metal Oxide Semiconductor (CMOS) technology. The n-MOSSETs are built within a pre-industrial Fully Depleted Silicon On Insulator (FDSOI) technology with a silicon thickness down to 10 nm on 200 mm wafers. The nominal channel size of 20 $\times$ 20 nm$^{2}$ is obtained by employing electron beam lithography for active and gate levels patterning. The Coulomb blockade stability diagram is precisely resolved at 4.2 K and it exhibits large addition energies of tens of meV. The confinement of the electrons in the quantum dot has been modeled by using a Current Spin Density Functional Theory (CS-DFT) method. CMOS technology enables massive production of SETs for ultimate nanoelectronics and quantum variables based devices.
Mesoscale and Nanoscale Physics