Coulomb Staircases and Differential Conductance Oscillations in A Simox-Based Single-Electron Transistor

S. B. Long,Z. G. Li,X. W. Zhao,B. Q. Chen,M. Liu
DOI: https://doi.org/10.4028/www.scientific.net/ssp.121-123.513
2007-01-01
Abstract:For compatibility with present CMOS devices, the single-electron transistor (SET) is preferably made in silicon. In this paper, a Si-based SET with in-plane side gates is proposed, which is fabricated in a SIMOX (Separation by IMplanted OXygen) wafer using electron beam lithography (EBL) with high-resolution SAL601 negative e-beam resist and inductively coupled plasma (ICP) etching. Carefully controlled the process, the SET with a 70-nm-radius Coulomb island is successfully fabricated. The R-ds-T characteristics of the SET indicate that the device has typical semiconductor characteristics and the co-tunneling phenomena is impossible to occur. The I-ds-V-ds characteristics of the SET at different values of V-g (-10 V, 0 V, 10 V) measured at the temperature of 2 K all show Coulomb staircases. And the good reproducibility of the I-ds-V-ds, characteristics can also be realized. The corresponding dI(ds)/dV(ds)-V-ds characteristics show the clear differential conductance oscillations at 2 K. The I-ds-V-g curve at V-ds = 0.1 V and V-g = 10 V approximately exhibits Coulomb oscillations. The fabrication process is quite easy and this kind of Si-based SET has the advantages of simplicity, IC-orientation and compatibility with traditional CMOS process.
What problem does this paper attempt to address?