Dielectric breakdown behavior of ferroelectric HfO2 capacitors by constant voltage stress studied by in situ laser-based photoemission electron microscopy

Yuki Itoya,Hirokazu Fujiwara,Cédric Bareille,Shik Shin,Toshiyuki Taniuchi,Masaharu Kobayashi
DOI: https://doi.org/10.35848/1347-4065/ad1e84
IF: 1.5
2024-02-06
Japanese Journal of Applied Physics
Abstract:In situ laser-based photoemission electron microscopy observations with time-dependent dielectric breakdown measurements of TiN/Hf0.5Zr0.5O2(HZO)/TiN ferroelectric capacitors were performed to reveal the dielectric breakdown (DB) mechanism. We succeeded in visualizing the hard DB spots through the top electrode. We found that capacitors with short- and long-lifetime distributions were broken down near and far from the edge of the capacitors, respectively. This indicates that the DB is either topography-dependent or film-quality-dependent. This work demonstrates an effective method of detecting DB in a non-destructive manner to provide an insight for achieving higher endurance HfO2-based ferroelectric capacitors.
physics, applied
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