Abstract:Electrothermal actuators are highly advantageous for microelectromechanical systems (MEMS) due to their capability to generate significant force and large displacements. Despite these benefits, their application in reconfigurable conduction line switches is limited, particularly when employing commercial processes. In DC MEMS switches, electrothermal actuators require electrical insulation between the biasing voltage and the transmission line to prevent interference and maintain the integrity of the switch. This work presents a chevron-type electrothermal actuator utilizing a stack of Al thin films on a silicon (Si) structural layer beam to create a DC MEMS switch. The design leverages a thin film Al heater to drive the actuator while the layer provides electrical insulation, suppressing crosstalk with the Si layer. The electrical contact resistance of a Si-to-Si interface was evaluated by applying a controlled current and measuring the resultant voltage. A low contact resistance of 150 Ω was achieved when an initial contact gap of 2.52 μm was closed using an actuator with an actuation voltage of 1.2 V and a current of 205 mA, with a switching speed of less than 5 ms. Factors such as the contact force, the temperature, and the residual device layer etching angle significantly impact the Si-to-Si contact resistance and the switch's longevity. The switch withstands a breakdown voltage up to 350 V at its terminal contacts. Thus, it will be robust to self-actuation caused by unwanted voltage contributions, making it suitable for high-voltage and harsh environment applications.

&Lt;title>study on DC-contact MEMS Switches</title>

Design and Analysis of a Lateral Lateral DC-Contact MEMS RF Switch with High Performance

DC-contact Series Radio-Frequency Micro Electromechanical System Switch with Slanting Beams

Design and Fabrication of DC to 30 GHz DC-contact Shunt RF MEMS Switch

Al/Au Composite Membrane Bridge DC-contact Series RF MEMS Switch

Research and Design of SPDT RF MEMS Switch

High Isolation MEMS Double Membranes Switches for Broadband Application

High-Isolation Contact Switch in Mems Phase Shifter

Laterally Actuated Si-to-Si DC MEMS Switch for Power Switching Applications

Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch

Metal contact capacitive switch on low-resistivity silicon wafer

Micromachined DC contact capacitive switch on low-resistivity silicon substrate

Improving Performance of the Metal-to-metal Contact RF MEMS Switch with a Pt–Au Microspring Contact Design

A Novel Three-State RF MEMS Switch for Ultrabroadband (DC-40 GHz) Applications

Design and Analysis of a DC and AC Separated MEMS Switch for X Band Application

Design and Fabrication of a Low Insertion Loss Capacitive RF MEMS Switch with Novel Micro-Structures for Actuation

Microstrip lateral RF MEMS switch integrated with multistep CPW transition

Molybdenum Disulfide Dc Contact Mems Shunt Switch

Copper-Based Multimetal-Contact Rf Mems Switch

Design and fabrication of X-band capacitive MEMS switches

Design And Fabrication Of A Latching Silicon-Based Mems Switch

&Lt;title&gt;study on DC-contact MEMS Switches&lt;/title&gt;