Abstract:MEMS switches are one of the most promising future micromachined products that have attracted numerous research efforts in recent years. The majority of MEMS switches reported to date employ electrostatic actuation, which requires large actuation voltages. Few are lateral relays and those often require nonstandard post process, and none of them is intended for high-frequency applications. We have developed an electrothermally actuated lateral-contact microrelay for RF applications. It is designed and fabricated on both low-resistivity and high-resistivity silicon substrate using surface micromachining techniques. The microrelay utilizing the parallel six-beam actuator requires an actuation voltage of 2.5-3.5 V. Time response is measured to be 300 mus and maximum operating frequency is 2.1 kHz. The RF signal line has a current handling capability of approximately 50 mA. The microrelay's power consumption is in the range of 60-100 mW. The lateral contact mechanism of the microrelay provides a high RF performance. The microrelay has an off-state isolation of -20 dB at 40 GHz and an insertion loss of -0.1 dB up to 50 GHz. The simplicity of this 4-mask fabrication process enables the possibility of integrating the microrelay with other passive RF MEMS components.

Novel Multicontact Radio Frequency Microelectromechanical System Switch in High-Power–handling Applications

Improving Performance of the Metal-to-metal Contact RF MEMS Switch with a Pt–Au Microspring Contact Design

DISTRIBUTED MULTICONTACT RF MEMS SWITCH FOR POWER HANDLING CAPABILITY IMPROVEMENT

Scalable Contact-Capacitive MEMS Switches with High Capacitance Ratio for Millimeter-Wave Applications

An Ultra-Broadband Contact-Capacitive RF MEMS Switch for 15-110GHZ Applications

Power Handling Capability Enhanced RF MEMS Switch Using Modified-Width Cantilevers Structure

Intermodulation Distortion in MEMS Capacitive Switches under High RF Power

Multi-contact Radiofrequency Microelectromechanical Systems Switch with Power Divider/combiner Structure for High Power Applications

Electro-thermally actuated RF MEMS switch for wireless communication.

A dielectric-bridge-type MEMS series contact switch for 0-10GHz applications

Low-voltage Micromachining-Based Scalable Optical Switch

A Low-Voltage Lateral MEMS Switch with High RF Performance

Design and fabrication of X-band capacitive MEMS switches

Design and Analysis of a Lateral Lateral DC-Contact MEMS RF Switch with High Performance

Copper-Based Multimetal-Contact Rf Mems Switch

Design and Fabrication of a Low Insertion Loss Capacitive RF MEMS Switch with Novel Micro-Structures for Actuation

Study on RF MEMS Switch with Four Parallel Ohm Contacts for Power Handling Enhancement

Design of Broadband High-Frequency Multi-Throw RF-MEMS Switches

Design of A Novel Bulk Micro-Machined Rf Mems Switch

SP4T RF MEMS Switch with Low Actuation Voltage

Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology