Abstract:We report a novel multicontact radio frequency (RF) microelectromechanical system (MEMS) switch with mechanical independent switch elements and microspring contacts. The consistent contact arrangement and the robust contact design can effectively increase the contact area, reduce the current density, and therefore improve the power-/current-handling capability. The working mechanism of the switch with microspring contact is investigated by CoventorWare (R) simulation tools. The switch, fabricated by the Cu-Ni dual-metallic-sacrificial-layer surface micromachining, is actuated at 55 V for characterization. The closing time is 11 mu s, and the opening time is 13.5 mu s. The isolation is -30.9 dB at 2 GHz and -11.5 dB at 20 GHz; the insertion loss is -0.12 dB at 2 GHz and -0.22 dB at 20 GHz. The contact metal is Pt-Au, and the measured switch resistance drops from 48 to 1.2 Omega when the actuation voltage increases from 40 to 65 V. The switch element handles a current of 300 mA at 0.1 Hz. The switch is an excellent candidate for microwave applications requiring high-power handling. (C) 2011 Society of Photo-Optical Instrumentation Engineers (SPIE). [DOI: 10.1117/1.3564864]

Design of A Novel Bulk Micro-Machined Rf Mems Switch

Capacitive Rf MEMS Switch with Composite Beam

Design and fabrication of X-band capacitive MEMS switches

Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch

Design and Fabrication of a Low Insertion Loss Capacitive RF MEMS Switch with Novel Micro-Structures for Actuation

Design of Micro Electro Mechanical System RF Switch

A Novel 3-resonance Capacitive RF MEMS Switch

Fabrication of a Micromachined Capacitive Switch Using the CMOS-MEMS Technology

Design and Analysis of a Lateral Lateral DC-Contact MEMS RF Switch with High Performance

A New Approach of Lateral RF MEMS Switch

Study on low voltage actuated MEMS rf capacitive switches

A Novel Three-State RF MEMS Switch for Ultrabroadband (DC-40 GHz) Applications

Preparing of a High Speed Bistable Electromagnetic RF MEMS Switch

An Analytical Model for High Performance Capacitive RF MEMS Switch Design

An Approach Of Lateral Rf Mems Switch For High Performance

Symmetrical Design And Analysis Of A Novel Mems-Based 1x2 Optical Switch

Low-voltage Micromachining-Based Scalable Optical Switch

A Novel X-Bands RF MEMS Switch with Enhanced Power Handlings

Design and Modeling of a Continuously Variable Piezoelectric RF MEMS Switch

Developing RF MEMS Switches Technology

Novel Multicontact Radio Frequency Microelectromechanical System Switch in High-Power–handling Applications