Abstract:We have reported a novel 1x2 MEMS optical switch for telecommunication application. A vertical mirror was fabricated by wet anisotropic etching in (110)-oriented silicon wafer. Using DRIE (Deep Reactive Ion Etching) technique, we make a torsional actuator to turn a vertical mirror with a small angle. The actuator was composed of a cantilever beam and two electrodes with curved shape edges. The mirror size was 500um (L) x 125um (H) x 50um (W), and the cantilever dimension was 3000um (L) x 125um (H) x 10um (W). In the optical switch, ball lenses were added in the optics system to extend working distance of fibers. We also fabricated a micro optical platform integrated with the device to simplify the coupling. On the platform, a U-shape groove and fiber clamps were fabricated to accommodate and fix the SMF (single mode fiber). The surface roughness (Ra) of etched mirror was tested below 10nm. The optical switch was tested on electric and optical characteristics: switching voltage 78.5V, resonance frequency 2.3kHz, insertion loss 4similar to5 dB, crosstalk 45dB. The device can perform the switching function by the large.

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