Abstract:Large-scale optical switches are greatly demanded in building optical interconnections in data centers and high performance computers (HPCs). Silicon optical switches have advantages of being compact and CMOS process compatible, which can be easily monolithically integrated. However, there are difficulties to construct large ports silicon optical switches. One of them is the non-uniformity of the switch units in large scale silicon optical switches, which arises from the fabrication error and causes confusion in finding the unit optimum operation points. In this paper, we proposed a method to detect the optimum operating point in large scale switch with limited build-in power monitors. We also propose methods for improving the unbalanced crosstalk of cross/bar states in silicon electro-optical MZI switches and insertion losses. Our recent progress in large scale silicon optical switches, including 64 × 64 thermal-optical and 32 × 32 electro-optical switches will be introduced. To the best our knowledge, both of them are the largest scale silicon optical switches in their sections, respectively. The switches were fabricated on 340-nm SOI substrates with CMOS 180- nm processes. The crosstalk of the 32 × 32 electro-optic switch was -19.2dB to -25.1 dB, while the value of the 64 × 64 thermal-optic switch was -30 dB to -48.3 dB.

Mach-Zehnder Based Optical Switches in Silicon-On-Insulator

Mach-Zehnder based 2×2 electro-optical switches on silicon-on-insulator with low crosstalk

Mach-Zehnder based 2X2 electro-optical switches on silicon-on-insulator with low crosstalk

Highly integrated 3×3 silicon thermo-optical switch using a single combined phase shifter for optical interconnects.

Ultra-large-scale Silicon Optical Switches

A CMOS Compatible 1&#x00d7;3 Optical Switch Based on Silicon on Insulator

2×2 Electrooptical Switch in Silicon-on-insulator Waveguide

Compact 1 X N Thermo-Optic Switches Based on Silicon Photonic Wire Waveguides.

Mach–Zehnder-Based Four-Port Switching Module on SOI

32 × 32 Silicon Electro-Optic Switch with Built-in Monitors and Balanced-Status Units.

A 2 × 2 Nonblocking Mach-Zehnder-based Silicon Switch Matrix.

2/spl times/2 electrooptical switch in silicon-on-insulator waveguide

Large-Scale Silicon Optical Switches for Optical Interconnection

Photothermal Switching Based on Silicon Mach–Zehnder Interferometer Integrated with Light Absorber

Scalable Nonblocking &Lt;inline-Formula> &Lt;tex-Math Notation="latex">$4\times4$ &Lt;/tex-Math> &Lt;/inline-Formula> Silicon Optical Switch Based on Dual-Microring Resonators

Large-Scale High-Speed Photonic Switches Fabricated on Silicon-Based Photonic Platforms

Design and Experimental Characterization of 1×2 Silicon Optical Switch

Development of Silicon Photonic Devices for Optical Interconnects

Fast, High-radix Silicon Photonic Switches.

A 4×4 MMI-MZ optical switch matrix on SOI based on carrier injection

CMOS-Compatible 1 $\times$ 3 Silicon Electrooptic Switch with Low Crosstalk