Novel structure of micromachined optical switch with self-aligned holding structures of optical fibers

Peiyu Zhang,Guoying Wu,Yi Long Hao
DOI: https://doi.org/10.1109/leos.2000.890669
2000-01-01
Abstract:The free-space micromachined optical switch with holding structures of fibers, which are formed at the same etch steps of switch structures, is demonstrated. The switch has been fabricated by mixture processes of surface micromachining and bulk silicon micromachining. It features self-alignment of optical fibers and the holding structures of fibers are integrated on a chip.
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