Fabrication and electromechanical characteristics of 2×2 torsion-mirror optical switch arrays with monolithically integrated fiber self-holding structures

Wengang Wu,Yi Long Hao,Dachao Li,Peiyu Zhang,Guoying Wu

2002-01-01

Abstract:Novel 2×2 torsion-mirror optical switch arrays are fabricated by using the mixed micromachining based on the surface and bulk silicon microelectronics, then are investigated electromechanically in applied direct and alternating electric fields. When the thickness of the elastic torsion beams suspending the aluminum coated polysilicon micro-mirrors of the switches in the arrays is about 1 μm, the electrostatic yielding voltages for driving the mirrors to achieve their ON-state are in the range of 270-290 V, and the minimum holding voltages for mirrors ON-state are found as 55 V or so. Theoretical analysis manifests that the yielding voltage is more sensitive to beam thickness than other design parameters about the torsion-mirror switch structures. The lifetime can reach 108 times. The estimated shortest switching time of the switches at least lasts for less than 2 ms. The force analysis on the two kinds of new fiber self-holding structures integrated monolithically in the chip of the optical switch arrays indicates that the structures can feature self-fixing and self-aligning of optical fibers.