Abstract:Novel torsion-mirror actuators with monolithically integrated new fiber holding structures, which can feature self-fixing and self-aligning of optical fibers, are fabricated in regular silicon wafers as well as in SOI wafers by using the mixed micromachining based on the surface and bulk silicon microelectronics. The electromechanical performances of the actuators and the optical properties of their micro-mirrors are investigated experimentally and theoretically. The electrostatic yielding voltages for driving the micro-mirrors of the actuators to tilt from 0° to 90° spontaneously are in the range of 270–290V and the minimum holding voltages for keeping the tilting angle of the mirrors to be in 90° are found 55V or so when the thickness of the torsion-beams suspending the mirrors is about 1μm. Theoretical analysis manifests that the yielding voltage is most sensitive to the beam thickness among the series of design parameters about the torsion-mirror actuator structures. The micro-mirrors of the actuators can cyclically vibrate 108 times at least between 0° and 90°, and their shortest actuating time can reach an estimated less than 2ms. The surface roughness and its distribution of the micro-mirrors of the actuators are small and smooth, respectively, which is acceptable for wavelength division multiplexing applications basically.

Fabrication and characterization of torsion-mirror actuators for optical networking applications

Electromechanical Studies On Micro Torsion-Mirror Actuators With Monolithically Integrated Fiber Self-Holding Structures

Novel Optical Torsion-Mirror Components For Fiber Sensing Or Networking Applications

Electromechanical and Optical Properties of Torsion-Mirror Actuators for Optical Switching Applications

Torsion-mirror Actuators with Compound Electrostatic Driving Structures

Tunable Silicon Reflection Cavity Mirror Based on Microring Resonator

Fabrication of the Open-Loop MEMS-Based Tilting Mirror Using the Compound Process

Design, Fabrication and Characterization of Novel Micromirror with Vertical Torsion Comb Driver

Fabrication and electromechanical characteristics of 2×2 torsion-mirror optical switch arrays with monolithically integrated fiber self-holding structures

Novel MEMS Torsional Mirror Optical Switch

An Improved Electrostatically-Driven Micro Torsion Mirror Fabricated by Silicon Micromachining for Optical Switching Devices

Micro Torsion Mirror Actuated by Compound Electrostatic Driving Structure

Fabrication Of Compact Turning Mirrors In Silicon-On-Insulator Materials

Analysis and Optimization of the Arrayed-Waveguide Grating Device with Total Internal Reflection Mirrors Based on Silicon-on-insulator Material

A Novel Electrostatically Driven Micromirror with Lateral Comb Actuators and T-Shaped Torsion Bars

Simulation, Optimization and Measurement of MEMS Torsion Micro Mirrors for Optical MEMS Application

Fabrication Of Integrated Waveguide Turning Mirror On Silicon-On-Insulator

Optical-Electromechanical Performance of Mems Tilting Micro-Mirrors for Aon Communication System

Hybrid Electrostatic Actuator for Micromirror Tilting

The Fabrication of 16*16 MEMS-Based Optical Switch with Accurate Optical Fiber Grooves Integration

Compact Integrated Waveguide Turning Mirror in SOI