Abstract:Novel torsion-mirror actuators with monolithically integrated new fiber holding structures, which can feature self-fixing and self-aligning of optical fibers, are fabricated in regular silicon wafers as well as in SOI wafers by using the mixed micromachining based on the surface and bulk silicon microelectronics. The electromechanical performances of the actuators and the optical properties of their micro-mirrors are investigated experimentally and theoretically. The electrostatic yielding voltages for driving the micro-mirrors of the actuators to tilt from 0° to 90° spontaneously are in the range of 270–290V and the minimum holding voltages for keeping the tilting angle of the mirrors to be in 90° are found 55V or so when the thickness of the torsion-beams suspending the mirrors is about 1μm. Theoretical analysis manifests that the yielding voltage is most sensitive to the beam thickness among the series of design parameters about the torsion-mirror actuator structures. The micro-mirrors of the actuators can cyclically vibrate 108 times at least between 0° and 90°, and their shortest actuating time can reach an estimated less than 2ms. The surface roughness and its distribution of the micro-mirrors of the actuators are small and smooth, respectively, which is acceptable for wavelength division multiplexing applications basically.

Fabrication of the Open-Loop MEMS-Based Tilting Mirror Using the Compound Process

Analysis and Fabrication of Torsion Micromirror Actuators Based on a MEMS Technology

Fabrication and characterization of torsion-mirror actuators for optical networking applications

Novel MEMS Torsional Mirror Optical Switch

Torsion-mirror Actuators with Compound Electrostatic Driving Structures

Electromechanical Studies On Micro Torsion-Mirror Actuators With Monolithically Integrated Fiber Self-Holding Structures

Fabrication Of Compact Turning Mirrors In Silicon-On-Insulator Materials

Hybrid Electrostatic Actuator for Micromirror Tilting

Novel Optical Torsion-Mirror Components For Fiber Sensing Or Networking Applications

Design, Fabrication and Characterization of Novel Micromirror with Vertical Torsion Comb Driver

Design and Analysis of Flexible Tilt Mirror Driven by Piezoelectric Thin Sheet Actuators

Micro Torsion Mirror Actuated by Compound Electrostatic Driving Structure

Design and fabrication of an electromagnetically actuated optical switch with precise tilt angle control

Fabrication Of Integrated Waveguide Turning Mirror On Silicon-On-Insulator

The Fabrication of 16*16 MEMS-Based Optical Switch with Accurate Optical Fiber Grooves Integration

Surface Micromachined Mirror Based on Pre-Stress Comb-Drive Actuator

Compact Integrated Waveguide Turning Mirror in SOI

Simulation, Optimization and Measurement of MEMS Torsion Micro Mirrors for Optical MEMS Application

Electromagnetically Driven MEMS Micromirror with Torsion Beam Structure

MEMS Scanning Mirror with Vertical Comb Actuator Based on Latching Technique

Optical-Electromechanical Performance of Mems Tilting Micro-Mirrors for Aon Communication System