Abstract:We have developed a manufacturing process for micromirrors based on microelectromechanical systems (MEMS) technology. The process involves designing an electrostatic vertically comb-driven actuator and utilizing a self-alignment process to produce a height difference between the movable comb structure and the fixed comb structure of the micromirror. To improve the stability of the micromirror, we propose four instability models in micromirror operation with the quasi-static driving principle and structure of the micromirror considered, which can provide a basic guarantee for the performance of vertical comb actuators. This analysis pinpoints factors leading to instability, including the left and right gap of the movable comb, the torsion beams of the micromirror, and the comb-to-beams distance. Ultimately, the voltages at which device failure occurs can be determined. We successfully fabricated a one-dimensional micromirror featuring a 0.8 mm mirror diameter and a 30 μm device layer thickness. The height difference between the movable and fixed comb structures was 10 μm. The micromirror was able to achieve a static mechanical angle of 2.25° with 60 V@DC. Stable operation was observed at voltages below 60 V, in close agreement with the theoretical calculations and simulations. At the driving voltage of 80 V, we observed the longitudinal displacement movement of the comb fingers. Furthermore, at a voltage of 129 V, comb adhesion occurred, resulting in device failure. This failure voltage corresponds to the lateral torsional failure voltage.

MEMS Scanning Mirror with Vertical Comb Actuator Based on Latching Technique

Driving Principle and Stability Analysis of Vertical Comb-Drive Actuator for Scanning Micromirrors

Machining and functional testing of adaptive micro-mirror array

Design of Novel Sequential Engagement Vertical Comb Electrodes for Analog Micromirror

Research of an Adaptive Micro-Mirror Based on Micro-Opto-Electro-Mechanical- System

Novel MEMS Torsional Mirror Optical Switch

Modeling and Optimization of a Novel ScAlN-Based MEMS Scanning Mirror with Large Static and Dynamic Two-Axis Tilting Angles

Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror

Process Platform For High Aspect-Ratio Self-Aligned Vertical Comb Actuators

Realization of Three-Dimensionally MEMS Stacked Comb Structures for Microactuators Using Low-Temperature Multi-Wafer Bonding with Self-Alignment Techniques in CMOS-Compatible Processes

Design, Fabrication and Characterization of Novel Micromirror with Vertical Torsion Comb Driver

Hybrid Electrostatic Actuator for Micromirror Tilting

Development of an Electrostatic Comb-Driven MEMS Scanning Mirror for Two-Dimensional Raster Scanning

Analysis of a Novel MEMS Electrostatic Comb Actuator for Optical Switching

A Novel Electrostatically Driven Micromirror with Lateral Comb Actuators and T-Shaped Torsion Bars

Design of an Electrostatic Silicon Torsion Micromirror for Low Drive Voltage and Wide Angle MEMS Optical Switch Applications

Design of a Tunable Resonant Micromirror

FR4-Based Electromagnetic Scanning Micromirror Integrated with Angle Sensor

A Novel Type Of Vertical Torsion Micro-Mirror With Combs

Design of Butterfly Plate Piezoelectric Actuator with Dual Driving Electrodes for MEMS Micro-Mirror

Symmetry breaking and mechanical filter make a pseudo-gimbal-less two-dimensional MEMS scanning mirror with multiple scanning modes