Design and investigation of dual-axis electrostatic driving MEMS scanning micromirror

Longqin Wu,Yu-Sheng Lin

DOI: https://doi.org/10.1080/15599612.2024.2350749

2024-05-23

International Journal of Optomechatronics

Abstract:Micro-electro-mechanical system (MEMS) is once proposed in 1970s and evolving rapidly. Current researchers are seeking for better designs and better applications for MEMS actuators. This work presents an electrostatic driven dual-axis scanning micromirror, i.e., two-dimensional (2D) scanning micromirror with mirror size of 500 μm × 500 μm. The scanning mirror is implemented by using bulk micromachining process on silicon on insulator (SOI) substrate, which is compatible with present complementary metal oxide semiconductor (CMOS) manufacturing technology. The scanning frequency of the slow axis and the fast axis is 4.87 kHz and 31.15 kHz, respectively. The impact factors of the dimensions of comb fingers and torsion beams are analyzed and discussed in this study. Under the driving voltage difference of 100 volts and 70 volts, the deviation angle is 4.57° × 13.08°. Therefore, a simple design of a dual-axis MEMS scanning micromirror is proposed, which can be precisely controlled without additional complex sensors or circuits.

engineering, mechanical, electrical & electronic,optics

What problem does this paper attempt to address?

The main problem that this paper attempts to solve is to design a biaxial electrostatic - driven MEMS scanning micromirror in order to achieve a two - dimensional scanning micromirror with high frequency, low power consumption, easy manufacturing and potential integration ability with other MEMS sensors. Specifically, the paper focuses on the following aspects:

1. **Increasing the scanning frequency**: The scanning frequencies of the MEMS scanning micromirror proposed in the paper on the slow axis and the fast axis are 4.87 kHz and 31.15 kHz respectively, which are much higher than those of similar designs in existing literature. This high - frequency design helps to avoid the influence of mechanical shocks (usually less than 2 kHz) common in automotive applications on the micromirror.

2. **Optimizing geometric parameters**: The paper analyzes in detail the influence of the size of comb teeth and torsion beams on the performance of the micromirror. By adjusting these parameters, the resonance frequency and scanning angle of the micromirror can be optimized, thereby improving its stability and scanning performance.

3. **Reducing the driving voltage**: Although electrostatic - driven MEMS micromirrors usually require a relatively high driving voltage, the design proposed in the paper can also achieve a large deflection angle at a lower driving voltage. For example, when a voltage difference of 70 volts is applied on the slow axis, the deflection angle can reach 4.57°; when a voltage difference of 30 volts is applied on the fast axis, the deflection angle can reach 13.08°.

4. **Simplifying the manufacturing process**: The design proposed in the paper adopts an SOI (Silicon on Insulator) substrate and uses processes such as deep - reactive - ion - etching (DRIE). These processes are compatible with existing CMOS manufacturing technologies, making the manufacturing process of the micromirror simpler and more reliable.

5. **Improving the linear characteristics**: The paper verifies the square relationship between the driving voltage and the deflection angle through experiments, indicating that this design has good linear characteristics, which is very important for precisely controlling the scanning angle of the micromirror.

In conclusion, this paper aims to develop a high - performance, low - power - consumption, and easy - to - integrate biaxial electrostatic - driven MEMS scanning micromirror through optimized design and manufacturing processes to meet the application requirements in fields such as laser projection display, light detection and ranging (LiDAR).