Abstract:A new kind of torsion micromirror with advanced vertical torsion comb driver is proposed and fabricated in silicon on insulator(SOI) wafers by combing with bulk micro machining and surface micro machining technology to improve the electromechanical performances and the optical properties. To evaluate the mechanical robustness and the electrical response, the electromechanical performances of the components are investigated by theory analysis and numerical simulation with finite element method(FEM) method and then the structures are optimized to improve the response speed and reduce the threshold voltage. According to the scalar scattering theory, a mathematical model, which describes the effects of the surface roughness on reflectivity and scattering, is constructed to analyze the optical properties of micromirrors. Then the surface roughness of micromirrors is measured by the atomic force microscope (AFM). The theoretical and experimental studies manifest that the vertical torsion comb structures with folded beams by SOI wafer are much benefit to decreasing the threshold voltages of actuating the micromirror ( making their tilting motion easier) and to enhancing the optical reflectivity of micromirror's surface.

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