A 16×16 Micro Mirror Array for Optical Switches

Qinghua Chen,Wengang Wu,Ziqian Wang,Guizhen Yan,Yilong Hao
DOI: https://doi.org/10.3321/j.issn:0253-4177.2008.08.016
2008-01-01
Chinese Journal of Semiconductors
Abstract:This paper reports on the design,fabrication,and performance of a high-reflectivity large-rotation mirror array for MEMS (micro-electro-mechanical system) 16×16 optical switches.The mirror in the array can enlarge its rotation an-gles up to 90°and keep a steady state to steer the optical signal.According to the large-rotation behavior,an electro-mechanical model of the mirror is presented.By monolithic integration of fiber grooves and mirrors fabricated by a sur-face and bulk hybrid micromachining process,the coarse passive alignment of fiber-mirror-fiber can be achieved.The re-flectivity of the mirror is measured to be 93.1%~96.3%.The switches demonstrate that the smallest fiber-mirror-fiber insertion loss is 2.1dB using OptiFocusTM collimating lensed fibers.Moreover,only about ±0.01dB oscillating amplitude of insertion loss is provoked after the device is tested for 15min for 5~90Hz in the vertical vibration amplitude of 3mm.
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