A Novel Miniature Optical Switch Array with Cantilever Micromirrors Driven by Pzt Films

TL Ren,Y Xu,LT Liu,ZJ Li

DOI: https://doi.org/10.1080/713718368

2002-01-01

Integrated Ferroelectrics

Abstract:A novel miniature optical switch array integrated with cantilever micromirrors driven by PZT (Lead Zirconium Titanate) films has been proposed. The micromirrors with uniform surfaces are fabricated in several mask steps by anisotropic bulk etching of (110) silicon wafer using KOH solutions with ultrasonic agitation. After the PZT films have been prepared, the wafer is etched from the upper side using Induced Couple Plasma etching (ICP) to form the whole cantilever structure. Each cantilever micromirror is driven by PZT films and is implemented to cut off the laser beam or let it pass through, enabling the switching. The optical switch array composed of the silicon micromirrors can be integrated to form a monolithic 4x4 optical crossconnect (OXC) with dimensions of about 6x6mm(2) , and is scalable to large array.